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FULL DESCRIPTION of Item 260163

in Other Chamber Components
Item ID: 260163

Offered 1 Offered at Best Price


Astex HPMS or HPMM Chamber
Unit Price Unstated
Number of Units 1
Manufacturer Astex (Seki Diamond
Model HPMM or HPMS CVD
Part Description 
  • Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
  • Also available at Cline Innovations:
    • Associated microwave delivery hardware and power subsystems.
    • Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.