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Single Chamber PECVD Tools


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Item IDItem DescriptionSize RangeCass to CassLoadlock#PriceNotes
MakeModelSet SizeLoadlock Y/N
$
184607 Astex AX5000, AX6000, AX6350 or similar 1 F*
189843 Astex AX6500 "Clamshell" MPCVD 1
137483 Astex ECR-MOCVD-PECVD 1
176520 Wavemat Diamond 915MHz MPCVD 1 F*

NOTE:
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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.