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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
165893

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
  • System can be offered "as is" to experienced buyers.
  • Full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
  • Computer controller may function, but upgrade is recommended and should be possible.
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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