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FULL DESCRIPTION of Item 184653

in Plasma Equipment Subsystems, Waveguides, etc.
Item ID: 184653

Offered 1 Offered at Best Price


Astex FI20170 Water-Cooled Circulator (or Equivalent)

  • This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.  
  • The integrated coupler measures reflected power using a diode senor.  The reflected power signal is processed using an integral circuit-board designed into the coupler.  Output is provided using a 9-pin male D-subminature connector.
  • These goods may also be compatible with Astex subsystems for non-OEM applications. 
  • Goods are most typically integrated with 2.5kW microwave delivery systems.
  • Photos included in this listing are for reference only.  The actual circulator shown in this listing has been sold, but depicts the general design.
  • Please contact Cline Innovations for more information.
Astex FI20170 Water-Cooled Circulator (or Equivalent)
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer Astex
Model FI20170 (0760-01028) AMAT Ulvac
Description 3-way Water-Cooled Circulator with Coupler
Accessories 
  • Fittings necessary to adapt from NPT pipe thread water-cooled circulator ports to 3/8" Swagelok may be available upon request.