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Microwave Generators and Process Power Delivery


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List all 4 product types under Microwave Generators and Process Power DeliveryList all 4 product types under Microwave Generators and Process Power Delivery
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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
257456

Gerling  

 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

15kW Compact, High Power Microwave Dummy Load:
  • Creatively designed, compact dummy load engineered to handle up to 15kW of microwave power.
  • Aluminum rectangular waveguide.
  • Plated brass water cooling section with 1/4" female threaded ports.
 1   N*
180513

Applied Materials  

3750-01129 

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in Microwave Generators and Process Power Delivery

AMAT 3750-01129:
  • This is a brand new microwave waveguide component.
 1  
184652

Applied Materials  

FI20104 (3750-01111) 

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in Microwave Generators and Process Power Delivery

 1  
199844

Applied Materials  

FI20099 

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in Microwave Generators and Process Power Delivery

AMAT Water-Cooled Dummy Load:
  • This is a brand new water-cooled dummy load with WR284 rectangular waveguide connection.
 1  
215272

HNL Inc.  

AMAT 0190-02099 / 001 

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in Microwave Generators and Process Power Delivery

AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
  • Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
  • Only 1 in inventory.  Photos provided upon request.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
 1 475.00
165746

MKS instruments  

FI20166 (3750-01147) 

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in Microwave Generators and Process Power Delivery

Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Coordination of this repair may be possible in conjunction with the sale. 
 1  
183180

MKS Instruments  

FI20634 

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in Microwave Generators and Process Power Delivery

Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit. 
  • Detailed photos can be provided upon request.
 1  
213304

MKS instruments  

Astex 1.0kW AX3060 

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in Microwave Generators and Process Power Delivery

Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
 1  
211656

MKS instruments  

AX3060-1 for AX2115 

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Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
  • Unit will be removed from plasma system and physical condition looks great.
 1  
190326

Astex  

Astex WR340 Circulator 

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in Microwave Generators and Process Power Delivery

Astex 3-way Circulator or Equivalent:
  • Offered as used, microwave-tested goods.
  • Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
  • Equipped with a reflected power coupler & associated SMA connector at Port 3.
  • This component design was commonly used on 1990s-vintage Astex high power microwave generators.  It also offers potential utility for non-Astex microwave delivery systems.
  • Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
  • Photos available upon request.
 1  
209065

Astex  

FI20131 Fl20131 3750-01139 

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Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts).
 2  
203295

MKS instruments  

FI20608, Fl20608 

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in Microwave Generators and Process Power Delivery

ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
  • 4 images attached show the condition of one of used parts.
  • On-site microwave testing may be possible upon request.
 3   F*
255066

Astex  

A 5000 A5000 A-5000 

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Astex A5000 5kW Industrial Microwave Generator Set:
  • Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
    • Remote water-cooled magnetron head,
    • Circulator with integrated directional coupler, and
    • Water-cooled dummy load.
  • The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
  • Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
 1  
225956

Astex  

Astex AX2050 

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Astex AX2050 Microwave Generator Set:
  • Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator with integrated directional coupler.
    • All interconnecting cables for the above components.
  • Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
  • This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
  • A limited warranty can be considered depending on the application.
  • Photos available upon request.
 1  
255065

Astex  

Astex AX2107 

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Astex AX2107 700W Microwave Generator:
  • Cline Innovations has a used AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in a clean-room setting.  
  • Goods available as a power supply only or as a complete 700W microwave generator set including cables as well as WR284 waveguide components including: remote magnetron head, circulator with integrated directional coupler, and dummy load.
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  
  • This specific generator set came from a working system used in an R&D setting.  Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
 1  
213180

Astex  

Astex AX2518 

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ASTeX AX2518 SmartPower 1.8kW Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
 2  
165747

Astex  

AX3032 

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in Microwave Generators and Process Power Delivery

Astex AX3032 (or equivalent) Water-Cooled Circulator & Coupler:
  • Water-cooled, 3-way circulator with integrated directional coupler, signal processing board.
  • DSubminiature 9-pin connection (for reflected power signal).
  • WR284 waveguide component intended for use with Astex 2.5kW microwave generators including AX2050.
 1  
254281

MKS instruments  

AX3120 

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in Microwave Generators and Process Power Delivery

Astex AX3120 Air-Cooled Microwave Circulator:
  • Cline Innovations has an air-cooled Astex circulator intended for use on AX2100 series microwave generators including the AX2115 generator with 1.5kW max 2.45GHz output.
  • Goods to be pulled from a waveguide assembly removed from a plasma processing tool.  Careful inspection of the ceramic magnet will be performed at the time of disassembly.
  • This disassembly can be expedited & photos can be provided upon request.
 1  
165749

Astex  

AX3153 

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Astex AX3153 or equivalent Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
 1  
165750

Astex  

CS2 

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Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
 1  
184653

Astex  

FI20170 (0760-01028) AMAT Ulvac 

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Astex FI20170 Water-Cooled Circulator (or Equivalent):
  • This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.  
  • The integrated coupler measures reflected power using a diode senor.  The reflected power signal is processed using an integral circuit-board designed into the coupler.  Output is provided using a 9-pin male D-subminature connector.
  • These goods may also be compatible with Astex subsystems for non-OEM applications. 
  • Goods are most typically integrated with 2.5kW microwave delivery systems.
  • Photos included in this listing are for reference only.  The actual circulator shown in this listing has been sold, but depicts the general design.
  • Please contact Cline Innovations for more information.
 1  
168802

Astex  

Astex Model HS 

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Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
 1  
168804

Astex  

Astex HS-1000 or HS1000 

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Astex HS-1000 Air-Cooled 1000W Magnetron Head:
  • For use with compatible Astex 1kW switching microwave power supplies.
 1  
257457
Astex HS5000 5kW magnetron head or equivalent 

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Astex HS5000 5kW magnetron head or equivalent:
  • Water-cooled and air-cooled remote magnetron head.
  • Equipped with waveguide arc detector.
  • WR340 output waveguide.
 1   N*
254280

MKS instruments  

Astex ASO2555-55 

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Astex MKS Microwave 55-foot HV Cable for AX2115:
  • Long Hight Voltage Cable for OEM Semiconductor Tools including AMAT.
  • This cable interconnects cetain Astex rack-mounted power supplies to remote magnetron heads.  It is being offered is in excellent, possibly new, condition.
  • This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max.
  • Photos can be provided upon request.
 1  
254384

Astex  

(AGL) Astex B13171  

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in Microwave Generators and Process Power Delivery

Astex Model B13171 Microwave Dual Directional Coupler:
  • Pre-owned dual directional coupler with integrated flange interlock.
  • WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
  • Both couplers are factory rated for 60dB.
  • Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
  • Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
  • Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past. 
  • Photos and further information can be provided upon request.
 1  
202814

Astex  

Model TS or Equivalent 

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ASTEX Three Stub Manual Microwave Impedance Tuner:
  • Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
  • This tuner design is intended for use with 2.45GHz microwaves. 
  • Astex sold goods of this general design for use on generators rated for outputs of up to 5kW.  Actual rating can be clarified at the time of sale in relation to your application details.
  • The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
  • Refurbished as needed to ensure mechanical and electromagnetic functionality.
  • These dials can age or get jammed due to impact.  Cline Innovations replaces dials and components as needed during refurbishment.
 1  
165710

Astex  

Model LS or Equivalent/Substitute 

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in Microwave Generators and Process Power Delivery

Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
  • New, surplus goods may be available.
 1  
248913

Astex  

AX3030 

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Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok adaptors.
  • Design intended for up to 500W continuous reflected power. 
  • Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
  • Photos available upon request.
 1  
190257

Astex  

CPR340 or equivalent 

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Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • Approximate length is 5 to 6 inches.
 1  
184611

Astex  

Astex WR340 Dummy Load 

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Astex WR340 Water-Cooled Dummy Load:
  • Offered as used, microwave-tested goods.
  • WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
  • Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
  • Photos available upon request.
 2  
196069

Cober  

6kW microwave tuner 

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Cober Manual 3-Stub Tuner:
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
 1  
168904

Cober  

ST89 microwave  

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Cober ST89-1019 High Power Dummy Load:
  • 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
 1  
197423

Connecticut Microwav  

366004 

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Connecticut Microwave Dual-Directional Coupler:
  • 60 dB ports
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Round-flange connections [likely UG53/U  specification]
  • Photos provided upon request.
 1  
168803

MKS instruments  

Astex FI20047 

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FI20047 Water-Cooled Magnetron Head:
  • Mag Head for use with compatible MKS Astex series switching microwave power supplies.
  • This mag head design includes an orange colored Caton HV connector.
  • Goods in inventory may already have test history.  Testing may be possible at Cline Innovations.
  • Photos can be provided upon request.  
 1  
249550

Gerling  

GA2001 

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in Microwave Generators and Process Power Delivery

GAE GA2001 WR284 Waveguide to N Coax Transition:
  • Model GAE GA2001
  • Tag reads "Waveguide Trans CPR284 to N"
  • This is a WR284 rectangular waveguide microwave power transition to N-type coax.
 1  
215261

Gerling  

p/n 910677 c/n 403081 

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Gerling GAE WR430 Dual Directional Microwave Coupler:
  • Used, in great condition.
  • Intended for use at 55.0 dB coupling factor (forward and reflected).
  • Waveguide length is nominally 5 inches port-to-port.
  • Images can be provided upon request.
 1  
197421

Gerling  

GL401A 

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Gerling Laboratories 3-Port Circulator:
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Ceramic magnets look fine.
  • Round-flange connections.
  • Photos provided upon request.
 1  
214772
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 

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High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
  • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
  • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
  • If you need to connect to other waveguide types like WR284, adaptors may be available. 
  • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  The assembly example in the image is available for sale as of 5/7/2020.
  • Please contact Cline Innovations to discuss your needs.
 1  
257454

Muegge  

 

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High Power Microwave Dummy Load for 10,000 Watts:
  • Suitable for at least 10kW continuous microwave input at 2.45GHz.
  • 1/4" BSPP female water connections.
  • Flange type: UDR
  • Waveguide Size: WR430 Rectangular (R22)
  • New Condition
 1   N*
214758

Applied Materials  

FI20064  

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in Microwave Generators and Process Power Delivery

Microwave Phase Mag Detector :
  • One unit in inventory. 
  • Please inquire for details, photos, etc.
 1  
220461

MKS instruments  

Astex FI20161-1 Fl20161-1 

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 1  
220462

MKS instruments  

Astex FI20161 Fl20161 

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 1  
213290

MKS instruments  

SM445.0 SM-445 SM445 

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MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

 1   F*
184616

MKS Instruments  

AX2530PPD or equivalent 

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MKS Astex 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
 1  
237494

MKS instruments  

AX2560PPD or equivalent 

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MKS Astex 6kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
 1  
223137

MKS instruments  

FI20164 

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MKS Astex FI20164 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • Physical aesthetic condition is excellent.
 1  
236650

Muegge  

MW1003A-210EC 

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Muegge 3kW Water-Cooled Microwave Isolator:
  • Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • All necessary 6mm metric fasteners.
  • Dummy load includes a microwave coupler with an N-type power measurement connection.
  • This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts.
  • Additional photos are available upon request.
 1  
203376

National Electronics  

WR340TUNERA 

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National Electronics WR340TunerA:
  • One used unit available in inventory.  Unit is functional, but one or more precision dials need to be replaced before shipment.
  • Actual unit may vary from one shown in photos.  We had 2 of these unit in stock, but only one is left in inventory.
  • From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator.  The sum of the two impedances is then seen by the power source as a matched load."
  • At 2450MHz:
    • VSWR:  from 1 to 5
    • Power:  3kW
    • Waveguide type:  WR340
 1  
196788

National Electronics  

YJ 1600, YJ-1600 NL 

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National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of YJ1600 magnetron tubes. 
  • Both NEW and USED tubes may be available.  Tube ages and conditions vary. 
  • Most tubes are the conventional YJ1600 design, but some tubes may be available in special water cooling or high-voltage flying-lead configurations.
  • A Limited Warranty may apply depending on factors including customer's intended application & microwave delivery configuration.
  • In general, Cline Innovations coordinates testing of tubes prior to sale unless negotiated otherwise. 
  • Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage. 
  • Cline Innovations double-boxes tubes when shipped to customers.
 1  
197844

Sairem  

6kW  

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Sairem 6kW Water-Cooled Microwave Isolator:
  • 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
  • Circulator and Dummy Load sections are still factory-sealed together. 
 2  
214757

Applied Materials  

FI20132 0040-36436 

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Waveguide Elbow with mounting bolts / springs:
  • WR284 90-degree, Waveguide Elbow with Mounts.
  • Only one unit on-hand.  Please inquire for details, photos, etc
 1  
202813

HNL Inc.  

AMAT 0190-00362 

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in Microwave Generators and Process Power Delivery

WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
 1  
202812

HNL Inc.  

AMAT 0190-00363 

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WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
  • Microwave waveguide elbow with black painted orange peel finish.
  • Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
 1  
197422

Waveline  

225-01 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Waveline Water-cooled 3-way Circulator :
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • 3kW CW rating.
  • Ceramic magnets look fine.
  • UG-584/U round-flange connections.
  • Photos provided upon request.
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215283
WR430 to WR340 Rectangular Waveguide Adaptor 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

WR430 to WR340 Rectangular Waveguide Adaptor:
  • Aluminum microwave waveguide transition painted with black "orangepeel" finish.
  • Photos can be provided upon request.
 1  
170454

National Electronics  

YJ1191-A, YJ-1191A, YJ 1191A NL 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

YJ1191A 6kW magnetron tube:
  • Cline Innovations has muliple YJ1191A magnetron tubes in physical inventory.
  • Both NEW-tested and USED-tested YJ1191A tubes are available as of 1/15/2025.
  • All YJ1191A tubes are tested prior to sale.  Customer's can choose from units full microwave power output or lower power output unit depending on budget and application needs.
  • Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage.  Cline Innovations double-boxes tubes when shipped to customers.
 1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.