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Microwave Generators and Process Power Delivery


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List all 4 product types under Microwave Generators and Process Power DeliveryList all 4 product types under Microwave Generators and Process Power Delivery
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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
180513

Applied Materials  

3750-01129 

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in Microwave Generators and Process Power Delivery

AMAT 3750-01129:
  • This is a brand new microwave waveguide component.
 1  
184652

Applied Materials  

FI20104 (3750-01111) 

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in Microwave Generators and Process Power Delivery

 1  
199844

Applied Materials  

FI20099 

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in Microwave Generators and Process Power Delivery

AMAT Water-Cooled Dummy Load:
  • This is a brand new water-cooled dummy load with WR284 rectangular waveguide connection.
 1  
215272

Applied Materials  

0190-02099 / 001 

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in Microwave Generators and Process Power Delivery

AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
  • Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
  • Only 1 in inventory.  Photos provided upon request.
 1 425.00
165746

MKS Instruments, Inc  

FI20166 (3750-01147) 

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in Microwave Generators and Process Power Delivery

Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Repair should be possible. One option is to coordinate MKS factory repair in conjunction with the sale.
 1  
168726

Astex  

AX2107 

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ASTeX (MKS Instruments) AX2107 Microwave Generator 2.45GHz:
  • ASTeX AX2107 700 Watt switching microwave power supply
  • Offered as a power supply only or as a microwave delivery subsystem equipped with magnetron head, cables, and selected waveguide goods.

 

 1  
183180

MKS Instruments  

FI20634 

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in Microwave Generators and Process Power Delivery

Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit. 
  • Detailed photos can be provided upon request.
 1  
213304

MKS Instruments, Inc  

Astex 1.0kW AX3060 

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Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
 1  
211656

MKS Instruments, Inc  

AX3060-1 for AX2115 

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Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
  • Unit will be removed from plasma system and physical condition looks great.
 1  
225956

Astex  

2.5kW 

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Astex 2.5kW switching microwave generator set:
  • The complete tested, refurbished 2.5kw microwave generator set includes:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator.
    • All interconnecting cables for the above components.
  • Operational and ready to ship with relatively short lead-time. 
  • Limited warranty can be considered depending on the application.
 1  
209065

Astex  

FI20131 Fl20131 3750-01139 

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Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts).
 2  
203295

MKS Instruments, Inc  

FI20608, Fl20608 

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ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
  • 4 images attached show the condition of one of used parts.
  • On-site microwave testing may be possible upon request.
 3   F*
213180

Astex  

AX2518 

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ASTeX AX2518 SmartPower Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
 2  
165749

Astex  

AX3153 

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Astex AX3153 or equivalent Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
 1  
165748

Astex  

AX3153-1 

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Astex AX3153-1 Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
  • One used, microwave-tested unit is in Cline Innovations' physical inventory as of 8/20/2021.
 1  
165750

Astex  

CS2 

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Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
 1  
190326

Astex  

CS340 or equivalent 

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Astex CS340 3-way Circulator :
  • Painted aluminum, air-cooled microwave circulator commonly used with Astex 5000W microwave generators.
  • Equipped with a reflected power coupler at Port 3 (dummy load location).
 1  
168802

Astex  

HS 

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Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
 1  
168804

Astex  

HS-1000, HS1000 

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Astex HS-1000 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
 1  
168803

Astex  

HS-1500, HS1500 

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Astex HS-1500 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
 1  
165710

Astex  

Model LS or Equivalent/Substitute 

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Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
  • New, surplus goods may be available.
 1  
190257

Astex  

CPR340 or equivalent 

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Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • Approximate length is 5 to 6 inches.
 1  
184611

Astex  

LS340 

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Astex WR340 Water-Cooled Dummy Load:
  • Heat exchanger designed for use with 2.45GHz 5kW AX2040 & A-5000 microwave delivery subsystems used in applications with well-controlled reflected power levels.
 1  
196069

Cober  

6kW microwave tuner 

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Cober Manual 3-Stub Tuner:
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
 1  
168904

Cober  

ST89-1019 

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Cober ST89-1019 High Power Dummy Load:
  • 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
 1  
197423

Connecticut Microwav  

366004 

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Connecticut Microwave Dual-Directional Coupler:
  • 60 dB ports
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Round-flange connections [likely UG53/U  specification]
  • Photos provided upon request.
 1  
184653

Ulvac  

FI20170 (0760-01028) 

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FI20170 Water-Cooled Circulator with Integrated Coupler:
  • OEM water-cooled circulator with integrated directional coupler.  Likely used on AMAT and/or Ulvac systems.
  • This circulator type is commonly used with 2.5 kW microwave delivery subsystems.
 1  
215261

Gerling  

p/n 910677 c/n 403081 

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Gerling GAE WR430 Dual Directional Microwave Coupler:
  • Used, in great condition.
  • Intended for use at 55.0 dB coupling factor (forward and reflected).
  • Waveguide length is nominally 5 inches port-to-port.
  • Images can be provided upon request.
 1  
197421

Gerling  

GL401A 

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Gerling Laboratories 3-Port Circulator:
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Ceramic magnets look fine.
  • Round-flange connections.
  • Photos provided upon request.
 1  
214772
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 

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High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
  • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
  • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
  • If you need to connect to other waveguide types like WR284, adaptors may be available. 
  • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  The assembly example in the image is available for sale as of 5/7/2020.
  • Please contact Cline Innovations to discuss your needs.
 1  
214758

Applied Materials  

FI20064  

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Microwave Phase Mag Detector :
  • One unit in inventory. 
  • Please inquire for details, photos, etc.
 1  
220461

MKS Instruments, Inc  

FI20161-1 Fl20161-1 

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 1  
220462

MKS Instruments, Inc  

FI20161 Fl20161 

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in PVD Power Supplies

 1  
213290

MKS Instruments, Inc  

SM445.0 SM-445 SM445 

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MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

 1   F*
184616

MKS Instruments  

AX2530PPD or equivalent 

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MKS Astex 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
 1  
237494

MKS Instruments, Inc  

AX2560PPD or equivalent 

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MKS Astex 6kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
 1  
223137

MKS Instruments, Inc  

FI20164 

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MKS Astex FI20164 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • Physical aesthetic condition is excellent.
 1  
236650

Muegge  

MW1003A-210EC 

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Muegge 3kW Water-Cooled Microwave Isolator:
  • Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • All necessary 6mm metric fasteners.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with a known power sensitivity (dB rating).
  • Additional photos taken on 12/13/2022 are available upon request.
 1  
203376

National Electronics  

WR340TUNERA 

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National Electronics WR340TunerA:
  • One used unit available in inventory.  Unit is functional, but one or more precision dials need to be replaced before shipment.
  • Actual unit may vary from one shown in photos.  We had 2 of these unit in stock, but only one is left in inventory.
  • From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator.  The sum of the two impedances is then seen by the power source as a matched load."
  • At 2450MHz:
    • VSWR:  from 1 to 5
    • Power:  3kW
    • Waveguide type:  WR340
 1  
196788

National Electronics  

YJ 1600, YJ-1600 

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National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of several YJ1600 magnetron tubes.  Tube ages and conditions vary.
  • Warranty can be considered depending on application/use details.
  • In general, tubes will be tested at Cline Innovations prior to sale unless negotiated otherwise.
 1  
203278

MKS Instruments, Inc  

3750-01145 

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OEM Water-Cooled Dummy Load:
  • One used, microwave-tested unit in Cline Innovations' Massachusetts inventory as of 8/20/2021.
  
  
  
  
  
  
  
  

 

 1  
197844

Sairem  

6kW  

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Sairem 6kW water-cooled isolator:
  • 3-way microwave circulator and dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
 2  
214757

Applied Materials  

FI20132 0040-36436 

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Waveguide Elbow with mounting bolts / springs:
  • WR284 90-degree, Waveguide Elbow with Mounts.
  • Only one unit on-hand.  Please inquire for details, photos, etc
 1  
202813

Applied Materials  

0190-00362 

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WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
 1  
202812

Applied Materials  

0190-00363 

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WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
  • Microwave waveguide elbow with black painted orange peel finish.
  • Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
 1  
197422

Waveline  

225-01 

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Waveline Water-cooled 3-way Circulator :
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • 3kW CW rating.
  • Ceramic magnets look fine.
  • UG-584/U round-flange connections.
  • Photos provided upon request.
 1  
215283
WR430 to WR340 Rectangular Waveguide Adaptor 

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WR430 to WR340 Rectangular Waveguide Adaptor:
  • Aluminum microwave waveguide transition painted with black "orangepeel" finish.
  • Photos can be provided upon request.
 1  
170454

National Electronics  

YJ1191-A, YJ-1191A, YJ 1191A 

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YJ1191A 6kW magnetron tube:
  • Choose from a new YJ1191-A unit with full microwave power output or a used, lower output unit depending on your budget and application needs.
  • Test results can be provided upon request prior to purchase.
 1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.