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Item ID |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
| Make |
Model |
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$ |
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261059
|
MKS Instruments, Inc |
Astex FI20127 (3750-01135) |
in Microwave Generators and Process Power Delivery
180-degree Waveguide Bend:- Compact U-shaped WR284 waveguide component, likely removed from a semiconductor process tool.
- Each waveguide end is equipped with rectangular flanges with 10 holes. 1 of 2 flanges has Helicoil inserts to create threaded holes for 1/4-20 bolts.
- Photos can be provided upon request.
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1
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N* |
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214757
|
Applied Materials |
FI20132 (0040-36436) |
in Microwave Generators and Process Power Delivery
AMAT SACVD Mounting Flange, Waveguide Elbow :- WR284 90-degree, Waveguide Elbow with spring-loaded mounts.
- Threaded holes on both flanges (Helicoil inserts).
- Please inquire for details, photos, etc.
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1
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215272
|
HNL Inc. |
AMAT 0190-02099 / 001 |
in Microwave Generators and Process Power Delivery
AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:- Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
- Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
- Photos provided upon request.
- Only 1 in inventory.
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1
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475.00 |
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165746
|
MKS instruments |
Astex FI20166 (3750-01147) |
in Microwave Generators and Process Power Delivery
Astex (AMAT) 3kW SmartMatch Tuner:- 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
- Repair required: Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests.
- Coordination of this repair may be possible in conjunction with the sale.
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1
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183180
|
MKS Instruments |
Astex FI20634 |
in Microwave Generators and Process Power Delivery
Astex (MKS) SmartMatch Tuner with Integrated PPD:- This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile. The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".
- This SmartMatch unit progressed to a "Ready" status during initial tests.
- Detailed photos can be provided upon request.
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1
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190326
|
Astex |
CS340 or Equivalent |
in Microwave Generators and Process Power Delivery
Astex 3-way Circulator or Equivalent:- Offered as used, microwave-tested goods.
- Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
- Equipped with a reflected power coupler & associated SMA connector at Port 3.
- This component design was commonly used on 1990s-vintage Astex high power microwave generators. It also offers potential utility for non-Astex microwave delivery systems.
- Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
- Photos available upon request.
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1
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203295
|
MKS instruments |
Astex FI20608, Fl20608 |
in Microwave Generators and Process Power Delivery
ASTEX 90-degree Waveguide Elbow:- Waveguide elbow with 90-degree bend.
- Aluminum component with black orange-peel paint commonly used on ASTEX goods.
- 1 of 2 flanges has threaded holes (Helicoil inserts) to accept 1/4-20 bolts.
- 4 images attached show the condition of one of the used parts. Other photos can be provided upon request.
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3
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F* |
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209065
|
MKS Instruments, Inc |
Astex FI20131 (3750-01139) |
in Microwave Generators and Process Power Delivery
Astex 90-degree Waveguide Elbow:- Used goods.
- Aluminum waveguide with black orange-peel painted exterior.
- Threaded holes on both flanges (Helicoil inserts) eases assembly in confined spaces.
- Made for an Applied Materials OEM application, but suitable for general use at 2.45GHz.
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4
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209066
|
Astex |
AX3008 |
in Microwave Generators and Process Power Delivery
Astex 90-degree Waveguide Elbow with extension:- WR284 waveguide elbow with one elongated side.
- One of two flanges has threaded holes (Helicoil inserts).
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2
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255066
|
Astex |
A 5000 A5000 A-5000 |
in PVD Power Supplies
Astex A5000 5kW Industrial Microwave Generator Set:- Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
- Remote water-cooled magnetron head,
- Circulator with integrated directional coupler, and
- Water-cooled dummy load.
- The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
- Testing of the goods can be expedited upon request.
- Photos are also available upon request.
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1
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261504
|
Astex |
D13614 |
in PVD Power Supplies
Astex AGL D13614 6kW Magnetron Head:- Uses modified YJ1600 6kW magnetron tube.
- Includes and N-type connector on the waveguide launch section.
- Goods have not been tested due to lack of a compatible power supply.
- Preliminary measurements on the magnetron tube suggest that it should be functional.
- Very good physical condition.
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1
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N* |
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260210
|
Astex |
AX2040 or equivalent |
in PVD Power Supplies
Astex AX2040 (or equivalent) Microwave Generator:- Cline Innovations has inventory of hardware related to the Astex AX2040 microwave generator.
- Please don't hesitate to contact Cline Innovations if you are in need of components, magnetron tubes, or are seeking a complete generator set.
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1
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225956
|
Astex |
AX2050 |
in PVD Power Supplies
Astex AX2050 Microwave Generator Set:- Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
- 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
- Water-cooled 2.5kW magnetron head with variable output.
- Water-cooled 3-way circulator with integrated directional coupler.
- All interconnecting cables for the above components.
- Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
- This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time.
- This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.
- A limited warranty can be considered depending on the application.
- Photos available upon request.
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1
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255065
|
Astex |
AX2107 |
in PVD Power Supplies
Astex AX2107 700W Microwave Generator:- Cline Innovations has a used, tested AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in an R&D clean-room setting.
- This microwave generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.
- Photos are also available upon request.
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1
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213180
|
MKS Instruments, Inc |
Astex AX2518 |
in PVD Power Supplies
ASTeX AX2518 SmartPower 1.8kW Microwave Power Supply:- Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
- Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
- Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
- Goods can be sold with a limited warranty.
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2
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260482
|
Astex |
AX3041 |
in Microwave Generators and Process Power Delivery
Astex AX3041 Three Stub Tuner:- Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
- This tuner design is intended for use with 2.45GHz microwaves. Astex sold tuners of this type for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale based on your application details.
- The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
- Refurbished as needed to ensure mechanical and electromagnetic functionality.
- These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment. Other sellers may not.
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1
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213304
|
MKS instruments |
Astex AX3060 |
in Microwave Generators and Process Power Delivery
Astex AX3060 SmartMatch Automated Microwave Tuner:- Automated microwave impedance matching unit previously used with plasma processing equipment.
- This unit has been tested by Cline Innovations.
- Actuated 3-stub tuner equipped with water cooling.
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1
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261013
|
Astex |
CPR3 |
in Microwave Generators and Process Power Delivery
Astex CPR3 WR284 Waveguide Section:- 3" long WR384 rectangular flange waveguide section.
- Aluminum component with black orange-peel finish.
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2
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N* |
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261607
|
Astex |
CS-1000 |
in Microwave Generators and Process Power Delivery
Astex CS-1000 3-Way WR284 Microwave Circulator:- Older vintage Astex 3-way microwave circulator in great physical condition.
- WR284 flange faces includes grooves for RF gasket material, but use of gaskets is not typically required.
- This type of circulator was typically used with Astex 1000W to 1500W microwave generators such as S-1000, S-1000i, S-1500, and S-1500i.
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1
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N* |
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165750
|
Astex |
CS2 |
in Microwave Generators and Process Power Delivery
Astex CS2 Circulator with Directional Coupler:- Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
- Intended for use on Astex generators with up to 1.5kW output such as S-1500i and S-1000i.
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1
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261483
|
Astex |
FI30618 |
in Microwave Generators and Process Power Delivery
Astex Directional Coupler with Integral Signal Processing:- Relatively rare Astex waveguide component which includes an AX3120-like single directional coupler with integral signal processing board.
- A 9-pin male Dsubminiature connector is used to handle the output signal in the same manner as the AX3120 circulator output.
- The signal processing board includes 2 potentiometers which can be used for calibration.
- WR284 waveguide section with 3-inch nominal length.
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1
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N* |
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260363
|
Astex |
GL212 |
in Microwave Generators and Process Power Delivery
Astex GL212 WR340 Dual Directional Microwave Coupler:- Astex WR340 black-painted aluminum waveguide component with 2 integrated directional couplers.
- Each coupler is equipped with an N-type connection for power measurement. The couplers are oriented in opposite directions so that one can measure forward power and the other can measure reflected power.
- This part was last calibrated on 1-6-14 and likely needs recalibration. Cline Innovations may be in a position to coordinate recalibration at the time of sale.
- The lower right side of photo 1of3 shows that some paint scuffing has taken place on the outside of the waveguide. This is a superficial blemish and the item is in Very Good physical condition.
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1
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260939
|
Astex |
HV Cable |
in PVD Power Supplies
Astex High Voltage HV Cable for Microwave Generator:- Cline Innovations has inventory of Astex HV Cables of various types and lengths.
- Current inventory includes cables which fit AX2115, S-1500, S-1500i, A5000, and AX2040 microwave generators rated for as much as 10,000 Watts.
- Please don't hesitate to contact us if you are in need of a cable. Please consider sharing photos and length information for your existing cable (if you have one) in addition to images of the back panel of your power supply.
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1
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N* |
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168804
|
Astex |
Astex HS-1000 or HS1000 |
in PVD Power Supplies
Astex HS-1000 Air-Cooled 1000W Magnetron Head:- For use with compatible Astex 1kW switching microwave power supplies.
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1
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257457
|
Astex |
HS 5000 HS5000 HS-5000 or equivalent |
in PVD Power Supplies
Astex HS5000 5kW magnetron head or equivalent:- Water-cooled and air-cooled remote magnetron head.
- Equipped with waveguide arc detector.
- WR340 output waveguide.
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1
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260217
|
Advanced Energy |
IPX-3750 |
in PVD Power Supplies
Astex IPX-3750 RF Generator for Heated Stage:- Cline Innovations owns multiple IPX power supplies and other goods related to vintage Astex RF heated stages.
- Please don't hesitate to contact Cline Innovations if you need support to maintain your system, are seeking a spare power supply, feel you need a power supply repair, etc.
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1
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184611
|
Astex |
LS340 |
in Microwave Generators and Process Power Delivery
Astex LS340 or equivalent Water-Cooled Dummy Load:- Offered as used, microwave-tested goods.
- WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
- Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
- Photos available upon request.
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2
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254280
|
MKS instruments |
Astex ASO2555-55 |
in PVD Power Supplies
Astex MKS Microwave 55-foot HV Cable for AX2115:- Long length High Voltage Cable for OEM Semiconductor Tools including Applied Materials equipment.
- This cable interconnects the Astex rack-mounted power supply to the remote magnetron head. It is being offered is in excellent, possibly new, condition.
- This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max.
- Photos can be provided upon request.
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1
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254384
|
Astex |
B13171 |
in Microwave Generators and Process Power Delivery
Astex Model B13171 Microwave Dual Directional Coupler:- Pre-owned dual directional coupler with integrated flange interlock.
- WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
- Both couplers are factory rated for 60dB.
- Mechanical flange interlock can be removed if not needed.
- Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
- This directional coupler proved to be functional during past use on Cline Innovations' test bench.
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1
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260497
|
Astex |
DCS |
in Microwave Generators and Process Power Delivery
Astex Model DCS WR284 Single-Directional Coupler:- Older vintage Astex WR284 waveguide component with integrated microwave coupler.
- Cline Innovations notes indicate that the standard factory-set "pick-up" for this coupler type is 50dB.
- Commonly used with Astex S-1000, S-1000i, S-1500 and S-1500i microwave generators.
- The coupler has an SMA connector which is typically mounted to an Alan Industries Diode.
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1
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260672
|
Astex |
S-1500i or S1500i |
in PVD Power Supplies
Astex S-1500i Microwave Generator:- Microwave-tested by Cline Innovations.
- Astex 1.5kW microwave generator with both front panel control (local) and computer control (local) options.
- Previously used for corporate R&D.
- Rack-mounted power supply is in excellent condition and includes upgrades including larger (more reliable) high voltage cable & connector design.
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1
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202814
|
Astex |
TS or equivalent |
in Microwave Generators and Process Power Delivery
ASTEX Three Stub Manual Microwave Impedance Tuner:- Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
- This tuner design is intended for use with 2.45GHz microwaves.
- Astex sold tuners of this design for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale in relation to your application details.
- The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
- Refurbished as needed to ensure mechanical and electromagnetic functionality.
- These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment. Other sellers may not.
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1
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165710
|
Astex |
LS or equivalent |
in Microwave Generators and Process Power Delivery
Astex Water-Cooled Dummy Load for use with 1.5kW systems:- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
- New, surplus goods may be available.
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1
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248913
|
Astex |
AX3030 or equivalent |
in Microwave Generators and Process Power Delivery
Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:- As of 8/19/2025, Cline Innovations inventory of the AX3030 has been depleted. Depending on your application, we may have a functional equivalent to offer.
- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok connectors.
- Design intended for up to 500W continuous reflected power.
- Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
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1
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190257
|
Astex |
CPR340 or equivalent |
in Microwave Generators and Process Power Delivery
Astex WR284 to WR340 Waveguide Adaptor:- Aluminum rectangular waveguide component.
- Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
- Commonly used with higher power Astex microwave delivery systems & plasma sources.
- Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
- The waveguide length is nominally 5.5 inches.
- 10 through holes on each flange.
- Photos available upon request.
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1
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196069
|
Cober |
6kW microwave tuner |
in Microwave Generators and Process Power Delivery
Cober Manual 3-Stub Tuner:- Waveguide component commonly used with 6kW generators including the Cober S6F.
- UG53/U round flange on WR-284 rectangular waveguide.
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1
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260600
|
Cober |
S6F |
in PVD Power Supplies
Cober S6F 6kW Microwave Generator:- Coming soon!
- Cober brand 6kW, 2.45GHz microwave generator.
- This generator is "tried and true" in heavy industry applications but also has utility in R&D applications within industry and academia.
- Goods to be professionally refurbished and tested prior to delivery.
- This generator is currently set up to operate with a National Electronics YJ1191A magnetron tube. The original tube is available as part of the sale. Other spare tubes can be quoted upon request.
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1
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168904
|
Cober |
ST89 |
in Microwave Generators and Process Power Delivery
Cober ST89-1019 High Power Dummy Load:- 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
- Waveguide component commonly used with 6kW generators including the Cober S6F.
- UG53/U round flange on WR-284 rectangular waveguide.
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1
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168803
|
MKS instruments |
Astex FI20047 |
in PVD Power Supplies
FI20047 Water-Cooled Magnetron Head:- Remote magnetron head for use with compatible MKS Astex series switching microwave power supplies.
- This mag head design includes an orange-colored Caton potted high voltage military connector.
- Goods in inventory may already have test history. Further testing may be possible at Cline Innovations.
- Photos can be provided upon request.
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2
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260800
|
Gerling |
GA1009 |
in Microwave Generators and Process Power Delivery
GAE GA1009 Precision 3-Stub Tuner, WR284:- 3-stub microwave impedance tuner with round flange connections.
- Photos available upon request.
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1
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N* |
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249550
|
Gerling |
GA2001 |
in Microwave Generators and Process Power Delivery
GAE GA2001 WR284 Waveguide to N Coax Transition:- WR284 rectangular waveguide microwave power transition to N-type coax with nominally 1000W power handling capacity.
- Per the attached PDF, GAE offers a series of high power waveguide to coax transitions that deliver high performance at relatively high microwave power levels. Each model in the series utilizes the classical cross-bar method of terminating the coaxial center conductor, thus minimizing or eliminating the voltage breakdown common with non-terminated designs. The power rating is limited only by the rating of the coaxial cable (provided by the customer) attached to the Type N connector, which in most cases does not exceed 1 kW.
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1
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260794
|
Gerling |
GA2301 |
in Microwave Generators and Process Power Delivery
GAE Model GA2301 WR284 elongated waveguide elbow:- Unpainted aluminum waveguide. Base model number is GA2301 with a (hard to read) suffix of -2-8.35 or perhaps -2-9.35.
- This elbow is elongated on one of the two sides. The other side is very short, possibly minimum length for a 90-degree design.
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1
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N* |
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215261
|
Gerling |
p/n 910677 (c/n 403081) |
in Microwave Generators and Process Power Delivery
Gerling GAE WR430 Dual Directional Microwave Coupler:- Used, in great condition.
- Intended for use at 55.0 dB coupling factor (forward and reflected).
- Waveguide length is nominally 5 inches port-to-port.
- Images can be provided upon request.
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1
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197421
|
Gerling |
GL401A |
in Microwave Generators and Process Power Delivery
Gerling Laboratories 3-Port Circulator:- Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
- Ceramic magnets look fine.
- Round-flange connections.
- Photos provided upon request.
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1
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214772
|
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) |
in Microwave Generators and Process Power Delivery
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):- Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power.
- Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
- If you need to connect to other waveguide types like WR284, adaptors may be available.
- Both round flange and rectangular flange loads are available as of 9/1/25.
- An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.
- Please contact Cline Innovations to discuss your needs.
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1
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220461
|
MKS instruments |
Astex FI20161-1 Fl20161-1 |
in PVD Power Supplies
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1
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220462
|
MKS instruments |
Astex FI20161 Fl20161 |
in PVD Power Supplies
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1
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213290
|
MKS instruments |
SM445.0 SM-445 SM445 |
in PVD Power Supplies
MKS Alter SM 445 Switch Mode Microwave Power Supply:- Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
- This specific power supply model is intended for Remote/PC control only. This unit does NOT have manual front panel controls.
- Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis. Interior looks like new.
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1
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F* |
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184616
|
MKS Instruments |
Astex AX2530PPD or equivalent |
in Microwave Generators and Process Power Delivery
MKS Astex 3kW Precision Power Detector:- The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
- The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
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1
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237494
|
MKS instruments |
Astex AX2560PPD or FI20116 |
in Microwave Generators and Process Power Delivery
MKS Astex 6kW Precision Power Detector:- The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
- The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
- One factory sealed unit available as of 8/28/2025.
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1
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223137
|
MKS instruments |
Astex FI20164 |
in Microwave Generators and Process Power Delivery
MKS Astex FI20164 3kW Precision Power Detector:- The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
- The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
- Physical aesthetic condition is excellent.
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1
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236650
|
Muegge |
MW1003A-210EC |
in Microwave Generators and Process Power Delivery
Muegge 3kW Water-Cooled Microwave Isolator:- Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
- WR340 rectangular waveguide connections.
- All necessary 6mm metric fasteners.
- Dummy load includes a microwave coupler with an N-type power measurement connection.
- This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts.
- Additional photos are available upon request.
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1
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260484
|
Muegge Gerling |
914791 |
in PVD Power Supplies
Muegge Gerling 1kW Magnetron Head 914791:- Water-cooled 1kW magnetron head with stainless steel enclosure.
- Goods look to be in new condition. They have not been tested due to lack of a compatible power supply at Cline Innovations.
- WR284 waveguide output.
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2
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257456
|
Muegge |
GA1232A |
in Microwave Generators and Process Power Delivery
Muegge Gerling GA1232A 15kW Compact Microwave Dummy Load:- Creatively designed, compact, dummy load offers high power capacity for its size.
- This is an aluminum WR430 rectangular waveguide component engineered to handle up to 15kW of microwave power.
- Plated brass water cooling section with 1/4" female threaded water-cooling ports.
- Equipped with single directional coupler (nominally 60dB) with N-type power measurement connection.
- Detailed photos available upon request.
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2
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261158
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Narda |
614A |
in Microwave Generators and Process Power Delivery
Narda WR284 Waveguide to N-type Coax Transition:- WR284 to Coax Waveguide adaptor.
- Round flange has 8 equally-spaced holes.
- This is an older vintage part which appears to be in very good condition.
- Photos can be provided upon request.
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N* |
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260188
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National Electronics |
MH3.0W-SL |
in PVD Power Supplies
National Electronics MH3.0W-SL Magnetron Head:- Magnetron head with stainless steel enclosure.
- This MH3.0W-SL model number is similar to the more standard model number MH3.0W-S1. The MH3.0W-S1 is rated for 3.0kW.
- Like the MH3.0W-S1, this magnetron head is assumed to be compatible with the Alter SM1150D (208V) or SM1150T (400V) power supply.
- Cline Innovations can seek more details on the specifications prior to purchase.
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260191
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National Electronics |
NL10230-7 |
in PVD Power Supplies
National Electronics NL10230-7 Water-Cooled Magnetron Tube:- Water-cooled magnetron head, likely intended for OEM (Matrix Axcelis) integrated microwave systems.
- Photos can be provided upon request.
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203376
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National Electronics |
WR340TUNERA |
in Microwave Generators and Process Power Delivery
National Electronics WR340TunerA:- One used unit available in inventory. Unit is functional, but one or more precision dials need to be replaced before shipment.
- Actual unit may vary from one shown in photos. We had 2 of these unit in stock, but only one is left in inventory.
- From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator. The sum of the two impedances is then seen by the power source as a matched load."
- At 2450MHz:
- VSWR: from 1 to 5
- Power: 3kW
- Waveguide type: WR340
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196788
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National Electronics |
YJ 1600, YJ-1600 NL |
in PVD Power Supplies
National Electronics YJ1600 6kW magnetron tube:- Cline Innovations has inventory of YJ1600 magnetron tubes.
- Both NEW and USED tubes may be available. Tube ages and conditions vary.
- Most tubes are the conventional YJ1600 design, but some tubes may be available in special water cooling or high-voltage flying-lead configurations.
- A Limited Warranty may apply depending on factors including customer's intended application & microwave delivery configuration.
- In general, Cline Innovations coordinates testing of tubes prior to sale unless negotiated otherwise.
- Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage.
- Cline Innovations double-boxes tubes when shipped to customers.
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261019
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Sairem |
300W Coaxial |
in PVD Power Supplies
Sairem 300W Coaxial Microwave Generator :- Used, rack-mounted microwave generator with coaxial output.
- Goods tested by Cline Innovations.
- Relatively compact design.
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N* |
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260457
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Sairem |
GMP-G4-60K-SM-T480-FST-PA |
in PVD Power Supplies
Sairem 6kW G4-Series microwave power supply:- Switching power supply intended to condition power for a Sairem remote magnetron head.
- Cline Innovations does not have inventory of the compatible Sairem magnetron head. This power supply could be used as a backup or a suitable magnetron head could be procured.
- This versatile power supply design includes both front panel (Local) as well as computer (Remote) control options making it a good choice for research as well as industrial applications.
- Detailed photos can be provided upon request.
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197844
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Sairem |
6kW Isolator |
in Microwave Generators and Process Power Delivery
Sairem 6kW Water-Cooled Microwave Isolator:- 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
- WR340 rectangular waveguide connections.
- Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
- Circulator and Dummy Load sections are still factory-sealed together.
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260985
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Sairem |
WR284 to WR340 Adaptor |
in Microwave Generators and Process Power Delivery
Sairem WR340 to WR284 Compact Waveguide Adaptor:- Rectangular waveguide adaptor with 100mm waveguide length.
- 10 through holes on each flange.
- Photos available upon request.
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N* |
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202813
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HNL Inc. |
AMAT 0190-00362 |
in Microwave Generators and Process Power Delivery
WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :- Microwave waveguide elbow with black painted orange peel finish.
- WR284 rectangular waveguide with rectangular flanges.
- Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
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202812
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HNL Inc. |
AMAT 0190-00363 |
in Microwave Generators and Process Power Delivery
WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:- Microwave waveguide elbow with black painted orange peel finish.
- Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
- Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
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197422
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Waveline |
225-01 |
in Microwave Generators and Process Power Delivery
Waveline Water-cooled 3-way Circulator :- Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
- 3kW CW rating.
- Ceramic magnets look fine.
- UG-584/U round-flange connections.
- Photos provided upon request.
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170454
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National Electronics |
YJ1191-A, YJ-1191A, YJ 1191A NL |
in PVD Power Supplies
YJ1191A 6kW magnetron tube:- Cline Innovations has muliple YJ1191A magnetron tubes in physical inventory.
- Both NEW-tested and USED-tested YJ1191A tubes are available as of 1/15/2025.
- All YJ1191A tubes are tested prior to sale. Customer's can choose from units full microwave power output or lower power output unit depending on budget and application needs.
- Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage. Cline Innovations double-boxes tubes when shipped to customers.
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ALL CATEGORIES
reference document attached
Group Offers into sub-categories 
Plasma Equipment Subsystems, Waveguides, etc.