PlasmaQuest Microwave-ECR Plasma system
This 6-inch Load-Lock PlasmaQuest high density plasma tool was built for for plasma etching, but also offers potential as a unique PECVD deposition tool. Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma. ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts. Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation). Originally equipped with a 1000W, but higher input power may be viable. Both "as is" sale as well as full refurbishment for etch and/or PECVD processing can be considered. Configured with 2 modules including power & controls rack and vacuum module.