Wavemat 915 MHz MPCVD Diamond Growth System

Cline Innovations is offering a Wavemat 915MHz microwave CVD diamond growth system.  This deposition system is recommended for synthetic diamond growth and/or large area plasma equipment development purposes. 

This system is capable of operation over a broad parametric space including 1.) large volume/diameter, low plasma power densities using a thermally-floating stage design or 2.) confined volume/diameter higher plasma power densities using a water-cooled stage design.  

Major System Features:

• Wavemat 915MHz internally-tunable microwave plasma apparatus.
• Nominally 10-inch diameter fused quartz bell jar enables handling of large area fixtures and substrates.
  • Roughly 4.5" processing diameter with water-cooled stage.
  • Roughly 6.0" processing diameter with thermally-floating stage.
  • Larger area processing may certainly be possible with system modifications, enhanced cooling.
• Double-jacketed stainless steel loading chamber mounted to a sturdy welded steel frame with thick aluminum tabletop.
• Typically operated at power levels under 12kW.
• Modular design enables application-specific modifications, plasma source development, etc.
• PC-based LabView controls.