Astex HPMS or HPMM Chamber
Description
- Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
- Also available at Cline Innovations:
- Associated microwave delivery hardware and power subsystems.
- Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.
1 unit @ Best Price
- Item number
- 260163
- Manufacturer
- Astex (Seki Diamond
- Model
- HPMM or HPMS CVD
- Location
- Leominster, MA US
- Category
- Other Chamber Components
