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Plasma Etch, PVD and Other Vacuum Systems


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Group Offers into sub-categories under Plasma Etch, PVD and Other Vacuum SystemsGroup Offers into sub-categories under Plasma Etch, PVD and Other Vacuum Systems

List all 19 product types under Plasma Etch, PVD and Other Vacuum SystemsList all 19 product types under Plasma Etch, PVD and Other Vacuum Systems


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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
168726

Astex  

AX2107 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX (MKS Instruments) AX2107 Microwave Generator 2.45GHz:
  • ASTeX AX2107 700 Watt switching microwave power supply
  • Offered as a power supply only or as a microwave delivery subsystem equipped with magnetron head, cables, and selected waveguide goods.

 

1  
225956

Astex  

2.5kW 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex 2.5kW switching microwave generator set:
  • The complete tested, refurbished 2.5kw microwave generator set includes:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator.
    • All interconnecting cables for the above components.
  • Operational and ready to ship with relatively short lead-time. 
  • Limited warranty can be considered depending on the application.
1  
213180

Astex  

AX2518 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX AX2518 SmartPower Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
2  
168802

Astex  

HS 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1  
168804

Astex  

HS-1000, HS1000 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS-1000 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1  
168803

Astex  

HS-1500, HS1500 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS-1500 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1  
222258

Astex  

S-1500i S1500i 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX S-1500i Microwave Generator 2.45GHz:
  • Used 1.5kW microwave generator set including the following ASTeX goods:
    • 19-inch rack-mount, switching power supply
    • 3-way circulator with integrated directional coupler
    • Water-cooled dummy load
    • Reflected power diode and associated cable.
    • High Voltage Cable
    • Control Cable
  • Good have already been tested at full power at Cline Innovations.
  • Power supply and mag head both use the larger/preferred HV cable military connector design common to newer-vintage power supplies.
  • Photos coming soon & available upon request.
1  
213290

MKS Instruments, Inc  

SM445.0 SM-445 SM445 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

1   F*
220461

MKS Instruments, Inc  

FI20161-1 Fl20161-1 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

1  
220462

MKS Instruments, Inc  

FI20161 Fl20161 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

1  
196788

National Electronics  

YJ 1600, YJ-1600 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of several YJ1600 magnetron tubes.  Tube ages and conditions vary.
  • Warranty can be considered depending on application/use details.
  • In general, tubes will be tested at Cline Innovations prior to sale unless negotiated otherwise.
1  
165893

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
  • System can be offered "as is" to experienced buyers.
  • Full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
  • Computer controller may function, but upgrade is recommended and should be possible.
1  
170454

National Electronics  

YJ1191-A, YJ-1191A, YJ 1191A 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

YJ1191A 6kW magnetron tube:
  • Choose from a new YJ1191-A unit with full microwave power output or a used, lower output unit depending on your budget and application needs.
  • Test results can be provided upon request prior to purchase.
1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.