Wavemat 915 MHz MPCVD Diamond Growth System
Cline Innovations is offering a Wavemat 915MHz microwave CVD diamond growth system. This deposition system is recommended for synthetic diamond growth and/or large area plasma equipment development purposes. This system is capable of operation over a broad parametric space including 1.) large volume/diameter, low plasma power densities using a thermally-floating stage design or 2.) confined volume/diameter higher plasma power densities using a water-cooled stage design. Major System Features: Wavemat 915MHz internally-tunable microwave plasma apparatus. Nominally 10-inch diameter fused quartz bell jar enables handling of large area fixtures and substrates. Roughly 4.5" processing diameter with water-cooled stage. Roughly 6.0" processing diameter with thermally-floating stage. Larger area processing may certainly be possible with system modifications, enhanced cooling. Double-jacketed stainless steel loading chamber mounted to a sturdy welded steel frame with thick aluminum tabletop. Typically operated at power levels under 12kW. Modular design enables application-specific modifications, plasma source development, etc. PC-based LabView controls.