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Cline Innovations Marketplace

Microwave Generators and Process Power Delivery

72 results
  1. Muegge Gerling GA1232A 15kW Compact Microwave Dummy Load
    Plasma Equipment Subsystems, Waveguides, etc.

    Muegge Gerling GA1232A 15kW Compact Microwave Dummy Load

    Creatively designed, compact, dummy load offers high power capacity for its size. This is an aluminum WR430 rectangular waveguide component engineered to handle up to 15kW of microwave power. Plated brass water cooling section with 1/4" female threaded water-cooling ports. Equipped with single directional coupler (nominally 60dB) with N-type power measurement connection. Detailed photos available upon request.

    Make: Muegge
    Model: GA1232A
    2 units @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 257456
  2. Astex A5000 5kW Industrial Microwave Generator Set
    Microwave and RF Generators

    Astex A5000 5kW Industrial Microwave Generator Set

    Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including: Remote water-cooled magnetron head, Circulator with integrated directional coupler, and Water-cooled dummy load. The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation. Testing of the goods can be expedited upon request. Photos are also available upon request.

    Make: Astex
    Model: A 5000 A5000 A-5000
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 255066
  3. Astex Model B13171 Microwave Dual Directional Coupler
    Plasma Equipment Subsystems, Waveguides, etc.

    Astex Model B13171 Microwave Dual Directional Coupler

    Pre-owned dual directional coupler with integrated flange interlock. WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end. Both couplers are factory rated for 60dB. Mechanical flange interlock can be removed if not needed. Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems. This directional coupler proved to be functional during past use on Cline Innovations' test bench.

    Make: Astex
    Model: B13171
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 254384
  4. Astex MKS Microwave 55-foot HV Cable for AX2115
    Microwave and RF Generators

    Astex MKS Microwave 55-foot HV Cable for AX2115

    Long length High Voltage Cable for OEM Semiconductor Tools including Applied Materials equipment. This cable interconnects the Astex rack-mounted power supply to the remote magnetron head. It is being offered is in excellent, possibly new, condition. This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max. Photos can be provided upon request.

    Make: MKS instruments
    Model: Astex ASO2555-55
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 254280
  5. GAE GA2001 WR284 Waveguide to N Coax Transition
    Plasma Equipment Subsystems, Waveguides, etc.

    GAE GA2001 WR284 Waveguide to N Coax Transition

    WR284 rectangular waveguide microwave power transition to N-type coax with nominally 1000W power handling capacity. Per the attached PDF, GAE offers a series of high power waveguide to coax transitions that deliver high performance at relatively high microwave power levels. Each model in the series utilizes the classical cross-bar method of terminating the coaxial center conductor, thus minimizing or eliminating the voltage breakdown common with non-terminated designs. The power rating is limited only by the rating of the coaxial cable (provided by the customer) attached to the Type N connector, which in most cases does not exceed 1 kW.

    Make: Gerling
    Model: GA2001
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 249550
  6. Astex Water-Cooled Dummy Load p/n AX3030 or equivalent
    Plasma Equipment Subsystems, Waveguides, etc.

    Astex Water-Cooled Dummy Load p/n AX3030 or equivalent

    As of 8/19/2025, Cline Innovations inventory of the AX3030 has been depleted. Depending on your application, we may have a functional equivalent to offer. Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok connectors. Design intended for up to 500W continuous reflected power.

    Make: Astex
    Model: AX3030 or equivalent
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 248913
  7. MKS Astex 6kW Precision Power Detector
    Plasma Equipment Subsystems, Waveguides, etc.

    MKS Astex 6kW Precision Power Detector

    The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners). One factory sealed unit available as of 8/28/2025.

    Make: MKS instruments
    Model: Astex AX2560PPD or FI20116
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 237494
  8. Muegge 3kW Water-Cooled Microwave Isolator
    Plasma Equipment Subsystems, Waveguides, etc.

    Muegge 3kW Water-Cooled Microwave Isolator

    Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use. WR340 rectangular waveguide connections. All necessary 6mm metric fasteners. Dummy load includes a microwave coupler with an N-type power measurement connection. This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts. Additional photos are available upon request.

    Make: Muegge
    Model: MW1003A-210EC
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 236650
  9. Astex AX2050 Microwave Generator Set
    Microwave and RF Generators

    Astex AX2050 Microwave Generator Set

    Cline Innovations is offering a refurbished 2.5kw microwave generator set including: 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality. Water-cooled 2.5kW magnetron head with variable output. Water-cooled 3-way circulator with integrated directional coupler. All interconnecting cables for the above components. Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request. This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. A limited warranty can be considered depending on the application. Photos available upon request.

    Make: Astex
    Model: AX2050
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 225956
  10. MKS Astex FI20164 3kW Precision Power Detector
    Plasma Equipment Subsystems, Waveguides, etc.

    MKS Astex FI20164 3kW Precision Power Detector

    The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners). Physical aesthetic condition is excellent.

    Make: MKS instruments
    Model: Astex FI20164
    1 unit @ Best Price
    Sold By: Cline Innovations
    Location: Leominster, MA US
    Item ID: 223137