Microwave Generators and Process Power Delivery

Make: MKS instruments

Model: Astex FI20161-1 Fl20161-1

1 unit @ Best Price

Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges. Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials. Photos provided upon request. Only 1 in inventory.

Make: HNL Inc.

Model: AMAT 0190-02099 / 001

1 unit @ $475.00

Used, in great condition. Intended for use at 55.0 dB coupling factor (forward and reflected). Waveguide length is nominally 5 inches port-to-port. Images can be provided upon request.

Make: Gerling

Model: p/n 910677 (c/n 403081)

1 unit @ Best Price

Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available. If you need to connect to other waveguide types like WR284, adaptors may be available. Both round flange and rectangular flange loads are available as of 9/1/25. An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image. Please contact Cline Innovations to discuss your needs.

Model: Various

1 unit @ Best Price

WR284 90-degree, Waveguide Elbow with spring-loaded mounts. Threaded holes on both flanges (Helicoil inserts). Please inquire for details, photos, etc.

Make: Applied Materials

Model: FI20132 (0040-36436)

1 unit @ Best Price

Automated microwave impedance matching unit previously used with plasma processing equipment. This unit has been tested by Cline Innovations. Actuated 3-stub tuner equipped with water cooling.

Make: MKS instruments

Model: Astex AX3060

1 unit @ Best Price

Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons. This specific power supply model is intended for Remote/PC control only. This unit does NOT have manual front panel controls. Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis. Interior looks like new.

Make: MKS instruments

Model: SM445.0 SM-445 SM445

1 unit @ Best Price

Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head. Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type. Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered! Goods can be sold with a limited warranty.

Make: MKS Instruments, Inc

Model: Astex AX2518

2 units @ Best Price

WR284 waveguide elbow with one elongated side. One of two flanges has threaded holes (Helicoil inserts).

Make: Astex

Model: AX3008

2 units @ Best Price

Used goods. Aluminum waveguide with black orange-peel painted exterior. Threaded holes on both flanges (Helicoil inserts) eases assembly in confined spaces. Made for an Applied Materials OEM application, but suitable for general use at 2.45GHz.

Make: MKS Instruments, Inc

Model: Astex FI20131 (3750-01139)

4 units @ Best Price

One used unit available in inventory. Unit is functional, but one or more precision dials need to be replaced before shipment. Actual unit may vary from one shown in photos. We had 2 of these unit in stock, but only one is left in inventory. From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator. The sum of the two impedances is then seen by the power source as a matched load." At 2450MHz: VSWR: from 1 to 5 Power: 3kW Waveguide type: WR340

Make: National Electronics

Model: WR340TUNERA

1 unit @ Best Price

Waveguide elbow with 90-degree bend. Aluminum component with black orange-peel paint commonly used on ASTEX goods. 1 of 2 flanges has threaded holes (Helicoil inserts) to accept 1/4-20 bolts. 4 images attached show the condition of one of the used parts. Other photos can be provided upon request.

Make: MKS instruments

Model: Astex FI20608, Fl20608

3 units @ Best Price