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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
254916

VAT  

F64-114543 / 1 

List all items of this typeVacuum Gate Valves

in Vacuum Valves

10-inch CF (DN 250) VAT Series 64 Stainless Gate Valve:
  • New with factory foam-lined box.  
  • 10-inch (DN 250) valve from "Direct Drive" F64-Series.
  • Stepper motor driven.
  • CF-F Fixed Flange Conflat connections.
  • See VAT 64 Series general documentation attached as PDF file.
  • Goods due to arrive at Cline Innovations by 2/2025.
    • Prelimiinary indications are that this is an all-ConFlat design.
    • Photos will be posted as soon as time allows.  
1  
261059

MKS Instruments, Inc  

Astex FI20127 (3750-01135) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

180-degree Waveguide Bend:
  • Compact U-shaped WR284 waveguide component, likely removed from a semiconductor process tool.
  • Each waveguide end is equipped with rectangular flanges with 10 holes.  1 of 2 flanges has Helicoil inserts to create threaded holes for 1/4-20 bolts.
  • Photos can be provided upon request.
1  
213176

3M  

FP-3M-FBD-24 

List all items of this typeHeating, Ventilating and Air Conditioning Systems

in Facilities Equipment (Chillers, HVAC, Electrical)

3M Fire Barrier Duct Wrap 15A (20ft Roll) Firewrap:
  • 1.5 inch x 24in or 48in x 20 ft Roll
  • This product does not include original factory packaging. 
  • The foil wrap on the roll is in good condition and is clearly marked with the 3M's 15A product label.
  • The goods have some minor shelf wear.  Photos can be provided upon request to clarify condition at the time of sale.
1 300.00
214757

Applied Materials  

FI20132 (0040-36436) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

AMAT SACVD Mounting Flange, Waveguide Elbow :
  • WR284 90-degree, Waveguide Elbow with spring-loaded mounts.
  • Threaded holes on both flanges (Helicoil inserts). 
  • Please inquire for details, photos, etc.
1  
215272

HNL Inc.  

AMAT 0190-02099 / 001 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
  • Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
  • Photos provided upon request.
  • Only 1 in inventory. 
1 475.00
165746

MKS instruments  

Astex FI20166 (3750-01147) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Coordination of this repair may be possible in conjunction with the sale. 
1  
183180

MKS Instruments  

Astex FI20634 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This SmartMatch unit progressed to a "Ready" status during initial tests.
  • Detailed photos can be provided upon request.
1  
190326

Astex  

CS340 or Equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex 3-way WR340 Microwave Circulator:
  • Used microwave goods.  At least one microwave-tested unit on hand as of 11/10/2025.
  • Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
  • Equipped with a reflected power coupler & associated SMA connector at Port 3.
  • This component design was commonly used on 1990s-vintage Astex high power microwave generators.  It also offers potential utility for non-Astex microwave delivery systems.
  • Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
  • Photos available upon request.
2  
203295

MKS instruments  

Astex FI20608, Fl20608 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes (Helicoil inserts) to accept 1/4-20 bolts.
  • 4 images attached show the condition of one of the used parts.  Other photos can be provided upon request.
3   F*
209065

MKS Instruments, Inc  

Astex FI20131 (3750-01139) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts) eases assembly in confined spaces.
  • Made for an Applied Materials OEM application, but suitable for general use at 2.45GHz.
4  
209066

Astex  

AX3008 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex 90-degree Waveguide Elbow with extension:
  • WR284 waveguide elbow with one elongated side.
  • One of two flanges has threaded holes (Helicoil inserts).
2  
255066

Astex  

A 5000 A5000 A-5000 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex A5000 5kW Industrial Microwave Generator Set:
  • Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
    • Remote water-cooled magnetron head,
    • Circulator with integrated directional coupler, and
    • Water-cooled dummy load.
  • The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.  It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
  • Testing of the goods can be expedited upon request.
  • Photos are also available upon request.
1  
261504

Astex  

D13614 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex AGL D13614 6kW Magnetron Head:
  • Uses modified YJ1600 6kW magnetron tube.
  • Includes N-type connector below the waveguide launch.
  • Goods have not been tested due to lack of a compatible power supply. 
  • Preliminary measurements on the magnetron tube suggest that it should be functional.
  • Very good physical condition. 
1  
260210

Astex  

AX2040 or equivalent 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex AX2040 (or equivalent) Microwave Generator:
  • Cline Innovations has inventory of hardware related to the Astex AX2040 microwave generator. 
  • Please don't hesitate to contact Cline Innovations if you are in need of components, magnetron tubes, or are seeking a complete generator set.
1  
225956

Astex  

AX2050 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex AX2050 Microwave Generator Set:
  • Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator with integrated directional coupler.
    • All interconnecting cables for the above components.
  • Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
  • This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
  • This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
  • A limited warranty can be considered depending on the application.
  • Photos available upon request.
1  
213180

MKS Instruments, Inc  

Astex AX2518 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX AX2518 SmartPower 1.8kW Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
2  
260482

Astex  

AX3041 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex AX3041 Three Stub Tuner:
  • Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
  • This tuner design is intended for use with 2.45GHz microwaves. Astex sold tuners of this type for use on Astex generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale based on your application details.
  • The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
  • Refurbished as needed to ensure mechanical and electromagnetic functionality.
  • These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment.  Other sellers may not.
1  
213304

MKS instruments  

Astex AX3060 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with plasma processing equipment.
  • This unit has been tested by Cline Innovations.
  • Actuated 3-stub tuner equipped with water cooling.
1  
184607

Astex  

AX5000, AX6000, AX6350 or similar 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

Astex AX5000 Microwave Plasma Diamond Growth System:
  • Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
  • System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
  • Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
  • This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
  • 1.5kW to 5kW microwave power input.
  • 3 stage options: Cooled, Heated, or Thermally Floating.
  • Integration with computer controls is strongly recommended.
  • Chamber designs vary by vintage, but can be confirmed at the time of quotation.
  • Please note that the chamber shown in the attached image is a new chamber.  The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
1   F*
189843

Astex  

AX6500 "Clamshell" MPCVD 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

Astex AX6500 Bottom-launch Diamond Growth System:
  • This in-stock equipment is offered for domestic sale within the USA only. 
  • Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
  • Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
  • System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
    • Chamber cleaning,
    • Computer control updates,
    • Higher throughput water cooling subsystem,
    • Replacement of selected o-ring components with metal seals, and
    • Enhanced process control/monitoring devices.
  • The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
  • Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
  • Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.
1  
261013

Astex  

CPR3  

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex CPR3 WR284 Waveguide Section:
  • 3" long WR384 rectangular flange waveguide section.
  • Aluminum component with black orange-peel finish.
2  
261607

Astex  

CS-1000 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex CS-1000 3-Way WR284 Microwave Circulator:
    • Older vintage Astex 3-way microwave circulator in great physical condition.
    • WR284 flange faces includes grooves for RF gasket material, but use of gaskets is not typically required.
    • This type of circulator was typically used with Astex 1000W to 1500W microwave generators such as S-1000, S-1000i, S-1500, and S-1500i.

 

1  
165750

Astex  

CS2 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S-1500i and S-1000i.
1  
261483

Astex  

FI30618 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex Directional Coupler with Integral Signal Processing:
  • Relatively rare Astex waveguide component which includes an AX3120-like single directional coupler with integral signal processing board. 
  • A 9-pin male Dsubminiature connector is used to handle the output signal in the same manner as the AX3120 circulator output.
  • The signal processing board includes 2 potentiometers which can be used for calibration.
  • WR284 waveguide section with 3-inch nominal length.
1  
260363

Astex  

GL212 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex GL212 WR340 Dual Directional Microwave Coupler:
  • Astex WR340 black-painted aluminum waveguide component with 2 integrated directional couplers.  
  • Each coupler is equipped with an N-type connection for power measurement.  The couplers are oriented in opposite directions so that one can measure forward power and the other can measure reflected power.
  • This part was last calibrated on 1-6-14 and likely needs recalibration.  Cline Innovations may be in a position to coordinate recalibration at the time of sale.
  • The lower right side of photo 1of3 shows that some paint scuffing has taken place on the outside of the waveguide.  This is a superficial blemish and the item is in Very Good physical condition.
1  
137483

Astex  

ECR-Microwave Plasma 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

ASTeX High Power, Low Pressure Microwave Plasma System :

Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.

1  
260939

Astex  

HV Cable 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex High Voltage HV Cable for Microwave Generator:
  • Cline Innovations has inventory of Astex HV Cables of various types and lengths. 
  • Current inventory includes cables which fit AX2115, S-1500, S-1500i, A5000, and AX2040 microwave generators rated for as much as 10,000 Watts.
  • Please don't hesitate to contact us if you are in need of a cable.  Please consider sharing photos and length information for your existing cable (if you have one) in addition to images of the back panel of your power supply.
1  
260163

Astex (Seki Diamond  

HPMM or HPMS CVD 

List all items of this typeChamber Components - Other

in Vacuum Instrumentation, Chambers, Pumps, etc.

Astex HPMS or HPMM Chamber:
  • Double-jacked water-cooled chamber intended for containment of 2.45GHz microwave plasma.
  • Also available at Cline Innovations:
    • Associated microwave delivery hardware and power subsystems.
    • Associated electromagnetically-engineered stage hardware for water-cooled or RF-heated applications.
1  
168804

Astex  

Astex HS-1000 or HS1000 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS-1000 Air-Cooled 1000W Magnetron Head:
  • For use with compatible Astex 1kW switching microwave power supplies.
1  
257457

Astex  

HS 5000 HS5000 HS-5000 or equivalent 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS5000 5kW magnetron head or equivalent:
  • Water-cooled and air-cooled remote magnetron head.
  • Equipped with waveguide arc detector.
  • WR340 output waveguide.
1  
260217

Advanced Energy  

IPX-3750 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex IPX-3750 RF Generator for Heated Stage:
  • Cline Innovations owns multiple IPX power supplies and other goods related to vintage Astex RF heated stages.
  • Please don't hesitate to contact Cline Innovations if you need support to maintain your system, are seeking a spare power supply, feel you need a power supply repair, etc.
1  
184611

Astex  

LS340 or AX3031 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex LS340 or AX3031 Water-Cooled Dummy Load:
  • Used microwave goods.  At least one microwave-tested unit on hand as of 11/10/2025.
  • WR340 2.45GHz microwave waveguide component designed for use with Astex A-5000 and AX2040 2.45GHz 5kW microwave delivery subsystems.
  • Water-cooled with 3/8" Swagelok connections.
  • Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
  • Photos available upon request.
2  
254280

MKS instruments  

Astex ASO2555-55 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex MKS Microwave 55-foot HV Cable for AX2115:
  • Long length High Voltage Cable for OEM Semiconductor Tools including Applied Materials equipment.
  • This cable interconnects the Astex rack-mounted power supply to the remote magnetron head.  It is being offered is in excellent, possibly new, condition.
  • This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max.
  • Photos can be provided upon request.
1  
254384

Astex  

B13171  

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex Model B13171 Microwave Dual Directional Coupler:
  • Pre-owned dual directional coupler with integrated flange interlock.
  • WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
  • Both couplers are factory rated for 60dB.
  • Mechanical flange interlock can be removed if not needed.
  • Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
  • This directional coupler proved to be functional during past use on Cline Innovations' test bench.
1  
260497

Astex  

DCS 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex Model DCS WR284 Single-Directional Coupler:
  • Older vintage Astex WR284 waveguide component with integrated microwave coupler.  
  • Cline Innovations notes indicate that the standard factory-set "pick-up" for this coupler type is 50dB.
  • Commonly used with Astex S-1000, S-1000i, S-1500 and S-1500i microwave generators.
  • The coupler has an SMA connector which is typically mounted to an Alan Industries Diode.
1  
260672

Astex  

S-1500i or S1500i 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex S-1500i Microwave Generator:
  • Microwave-tested by Cline Innovations.  
  • Astex 1.5kW microwave generator with both front panel control (local) and computer control (local) options.
  • Previously used for corporate R&D. 
  • Rack-mounted power supply is in excellent condition and includes upgrades including larger (more reliable) high voltage cable & connector design.
1  
202814

Astex  

TS or equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

ASTEX Three Stub Manual Microwave Impedance Tuner:
  • Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
  • This tuner design is intended for use with 2.45GHz microwaves. 
  • Astex sold tuners of this design for use on Astex generators rated for outputs of up to 5kW.  Actual rating can be clarified at the time of sale in relation to your application details.
  • The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
  • Refurbished as needed to ensure mechanical and electromagnetic functionality.
  • These dials can age or get jammed due to impact.  Cline Innovations replaces dials and components as needed during refurbishment.  Other sellers may not.
1  
165710

Astex  

LS or equivalent  

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • New, surplus goods may be available.
1  
248913

Astex  

AX3030 or equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:
  • As of 8/19/2025, Cline Innovations inventory of the AX3030 has been depleted.  Depending on your application, we may have a functional equivalent to offer.  
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok connectors.
  • Design intended for up to 500W continuous reflected power. 
  • Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
1  
190257

Astex  

CPR340 or equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • The waveguide length is nominally 5.5 inches.  
  • 10 through holes on each flange.
  • Photos available upon request. 
1  
262879

Astex  

Astex WCCISO 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex WR284 Waveguide to 7/16" DIN Coax Adaptor:
  • Compact, water-cooled waveguide-to-coax adaptor.
  • Rectangular WR284 waveguide connection.
  • 7/16" DIN Coax connection.
  • SMA connection for integral reflected power measurement.
  • Component is painted black and the waveguide appears to be machined from stainless steel.
1  
260599

Cober  

BPH-6000 

List all items of this typeBatch Ovens

in Ovens

Cober BPH-6000 Microwave Batch Pre-Heating Oven:
  • Cober brand 6kW, 2.45GHz microwave batch pre-heating oven equipped with rotary stage.
  • Oven was originally set up with a Cober S6F 6kW generator.  Therefore, the system has a single waveguide input intended to handle 6kW of microwave energy at the 2.45GHz frequency.
  • Goods can be sold with or without a Cober S6F 6kW generator, if available at the time of sale.
  • Photos can be provided upon request.
1  
196069

Cober  

6kW microwave tuner 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Cober Manual 3-Stub Tuner:
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1  
260600

Cober  

S6F 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Cober S6F 6kW Microwave Generator:
  • Coming soon!
  • Cober brand 6kW, 2.45GHz microwave generator.
  • This generator is "tried and true" in heavy industry applications but also has utility in R&D applications within industry and academia.
  • Goods to be professionally refurbished and tested prior to delivery.
  • This generator is currently set up to operate with a National Electronics YJ1191A magnetron tube.  The original tube is available as part of the sale.  Other spare tubes can be quoted upon request.
1  
168904

Cober  

ST89  

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Cober ST89-1019 High Power Dummy Load:
  • 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1  
190937

Detector Technology  

DeTech 1316F 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

DeTech 1316F F Electron Multiplier for FIB 800 Series:
  • DeTech 1316F F Electron Multiplier which appears to fit FIB 800 Series, Thermo FEI 200 mm System, Thermo FEI 300 mm System and Thermo FEI AUTO TRIM.
  • Two electron multiplier units to be sold as a single Lot of 2. 
  • Both acquired with original box and protective foam.  One unit was/is in a zip-locked bag.
  • Additional detailed inspection or photography can be coordinated upon request.  Use of an inspection microscope can be considered.
  • A right of return can be considered.
2  
117831

Edwards  

GV600F GV600 

List all items of this typeVacuum Pumping Systems

in Vacuum Pumps

Edwards Drystar GV600 Dry Pump with Aerzen Roots Blower GLB.15.11 HV-07 :

This is an offering for a pump & blower set including:  1.) Large capacity BOC Edwards GV600F Drystar dry mechanical pump and 2.) Aerzen GLB.15.11 HV-07 roots blower.

Please see attached documentation.

These goods are fully owned by Cline Innovations and are located near Boston.

From Edwardsvacuum.com:
The design of the Edwards GV dry pumps is based on the well-proven claw technology for dry pumps. Two pairs of claw shaped rotors on two shafts rotate in opposite directions to trap and compress the pro­cess gas which flows along the axis of the shafts between the claw pairs.


During each complete rotation of the claws, first the inlet port of each claw pair is exposed (to admit gas to the pump), then both the inlet and outlet are isolated (to trap and compress the gas), and then the outlet is exposed (to expel the compressed gas). The claw mechanism offers the following features:


•Dry operation, non contact mechanism
•Self valving - the pump can deliver to atmospheric pressure
•Short gas path - better particulate handling
•Staged compression - efficient power use
•High process temperature - excellent water vapor handling


Reliability
Low vacuum bearings (at the exhaust stage of the pump) are protected from the process stream by a unique gas-purged shaft-seal. Compressed air is fed to the shaft seals which prevents the ingress of process contaminants, including gases, vapors and particulates.

Low cost of ownership
GV pumps can offer real cost of ownership savings. The GV pumps are robust and reliable, delivering a reduction in process downtime which would lead to lost production. In addition, the minimized cost of routine maintenance (such as oil and filter replacement, spares inventory holding and oil disposal) all adds to the savings using GV dry pumps. With service intervals of 18 months for re-greased bearings and 3 years for bearing changes, the GV pumps offer a highly reliable and cost effective alternative to piston pumps.

1  
168803

MKS instruments  

Astex FI20047 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

FI20047 Water-Cooled Magnetron Head:
  • Remote magnetron head for use with compatible MKS Astex series switching microwave power supplies.
  • This mag head design includes an orange-colored Caton potted high voltage military connector.
  • Goods in inventory may already have test history.  Further testing may be possible at Cline Innovations.
  • Photos can be provided upon request.  
2  
260800

Gerling  

GA1009 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

GAE GA1009 Precision 3-Stub Tuner, WR284:
  • 3-stub microwave impedance tuner with round flange connections.
  • Photos available upon request.
1  
249550

Gerling  

GA2001 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

GAE GA2001 WR284 Waveguide to N Coax Transition:
  • WR284 rectangular waveguide microwave power transition to N-type coax with nominally 1000W power handling capacity.
  • Per the attached PDF, GAE offers a series of high power waveguide to coax transitions that deliver high performance at relatively high microwave power levels. Each model in the series utilizes the classical cross-bar method of terminating the coaxial center conductor, thus minimizing or eliminating the voltage breakdown common with non-terminated designs. The power rating is limited only by the rating of the coaxial cable (provided by the customer) attached to the Type N connector, which in most cases does not exceed 1 kW.
1  
260794

Gerling  

GA2301 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

GAE Model GA2301 WR284 elongated waveguide elbow:
  • Unpainted aluminum waveguide.  Base model number is GA2301 with a (hard to read) suffix of -2-8.35 or perhaps -2-9.35. 
  • This elbow is elongated on one of the two sides.  The other side is very short, possibly minimum length for a 90-degree design.
1  
262880

Gerling  

GL405 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Gerling 4-Stub Manual Microwave Tuner:
  • Used WR284 tuner with round flange connections. 
  • This older vintage component is in good condition and is offered as a low-cost solution for microwave research.
  • Unpainted aluminum waveguide body.  Brass stubs with knurled locking nuts.
  • Goods will be microwave tested prior to shipment.
  • Photos provided upon request.
1  
215261

Gerling  

p/n 910677 (c/n 403081) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Gerling GAE WR430 Dual Directional Microwave Coupler:
  • Used, in great condition.
  • Intended for use at 55.0 dB coupling factor (forward and reflected).
  • Waveguide length is nominally 5 inches port-to-port.
  • Images can be provided upon request.
1  
197421

Gerling  

GL401A 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Gerling Laboratories 3-Port Circulator:
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Ceramic magnets look fine.
  • Round-flange connections.
  • Photos provided upon request.
1  
115857
HFCVD System for CVD Diamond and Related Materials 

List all items of this typeHFCVD, HWCVD and Other CVD Tools

in ALL CATEGORIES

HFCVD System for CVD Diamond and Related Materials:
  • Hot Filament CVD system engineered for CVD Diamond growth on a 4 inch (~100mm) rotary platen.
  • Previously used for commercial R&D of polycrystalline CVD diamond materials.
  • 4-inch system design offers excellent potential for diamond, CNTs & related nanomaterials processing for both R&D and/or production.
    • NOT intended or marketed for single-crystal diamond gemstone growth.
  • Related 12-inch (~300mm) production-scale diamond HFCVD equipment is also available. 

4-inch HFCVD system design employs a 2-zone vertically-oriented filament array with independent controls for each zone. Rotary stage maximizes deposition uniformity. External substrate manipulation enables substrate-to-filament distance control. Refractory metal filaments can operate at >2000C and enable thermal decomposition of H2 and hydrocarbons into activated species.

Cline Innovations intends to coordinate reintegration/refurbishment of this system with updated controls and interlocks.  Reintegration will likely include PLC process monitoring, LCD display, pneumatic controls, and other features.  Tailoring of design to meet customer needs may be possible. 

1   F*
214772
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
  • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
  • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
  • If you need to connect to other waveguide types like WR284, adaptors may be available. 
  • Both round flange and rectangular flange loads are available as of 9/1/25.
  • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  
  • Please contact Cline Innovations to discuss your needs.
1  
260981

Holaday Industries  

HI-1500-3B 

List all items of this typeMeters - Other

in Meters

Holaday Microwave Interlock System HI-1500-3B:
  • Holaday Microwave Interlock for 2450MHz. 
  • Holaday Industries was acquired by ETS-Lindgren.
  • Please contact Cline Innovations if you would like photos or more information.
2  
190936

Lindgren  

Holaday HI-1501 

List all items of this typeMeters - Other

in Meters

Holaday Microwave Survey Meter HI-1501:
Holaday Microwave Survey Meter, Model number HI-1501, for 2450MHz.  Manufactured by ETS-Lindgren.

This Holaday HI-1501 survey meter comes in a portable, compact case.  The instrument is acceptable to the US Gov't Center for Devices and Radiological Health for compliance testing of microwaves and to all major microwave manufacturers for testing microwaves in use and after repair. 

Comes with manual and carrying case, and has been tested. The detection probe and meter amplifier are calibrated as a unit and serves all three 2450MHz ranges:  2, 10, and 100 mW/cm2.
1  
182423

Hyfra-Pedia (Lennox  

5820W Air-Cooled 

List all items of this typeChillers

in Facilities Equipment (Chillers, HVAC, Electrical)

Hyfra 5820W Air-Cooled Water Chiller:
  • Hyfra is a subsidiary of Lennox International Inc. which is based in Richardson, TX.
  • This rugged chiller was specified for use with a Coborn PL4 diamond polishing bench. Other uses should be possible.
  • On-site testing at Cline Innovations should be possible, if warranted.
1   F*
261484

IFM  

SM8004 

List all items of this typeMixed Lots of Test & Measurement Equipment

in Test & Measurement Equipment

IFM SM8004 Magnetic-inductive Liquid Flow Sensor:
  • New in Box.
  • Produced by ifm electronic gmbh (Germany).  Supported by Malvern, PA, USA location.
  • General Design:
    • Precise measurement of flow, consumption and medium temperature
    • High accuracy, repeatability and measurement dynamics
    • Includes two precise analog outputs--one for liquid flow rate & one for temperature of the liquid.
    • Clearly visible numerical display
  • Detailed Specs:
    • Measurment range:  0.2...100 l/min   0.1...26.4 gpm
    • Suitable liquids: Conductive liquids; water; water-based media with conductivity: ≥ 20 µS/cm and viscosity: < 70 mm²/s (40 °C). 
    • Suitable for -10C to 70C liquid temperatures AND capable of monitoring temperature in -20C to 80C range.
    • 1" nominal threaded connection.
    • 20-30V DC power.
  • Please see 3-page data sheet attached to this listing. Buyer to verify all specs prior to purchase.
4  
138488

UHV Instruments  

UHV Chamber 

List all items of this typeChamber Components - Other

in Vacuum Instrumentation, Chambers, Pumps, etc.

Large Volume UHV Vacuum Chamber with Sturdy Frame:
  • Stainless steel, metal-sealed chamber engineered for ultra high vacuum applications.
  • Previously used for ECR (electron cyclotron resonance) microwave plasma research.
  • Large chamber ends are removable (via rigging hooks) to ease maintenance and enable significant changes in configuration. 

SCALE REFERENCE: Open flange on left side of chamber in Image 2 is an 8" ConFlat.

Please see images & other details in PDF posted under "Extended Description". 

1   F*
117829

Spectra Gases  

 

List all items of this typeLasers & Related Equipment - Other

in Lasers and Related Equipment

Linde,Spectra Gases 3-Bottle Gas Cabinet with 206C Shutdown Controller
:

  • Model 206-C Spectra Gases PLC Control with spares available.
  • Multi Gas Controller set up with two HF transmitters, but other gas options exist from Linde.
  • Removable gas panels equipped with both F2 Premix and inert regulators.
  • Past use for excimer laser in semiconductor industry.
  • Limited controller and sensor/actuator testing has been performed.
6  
249551

Advanced Energy  

IMPAC p/n IS 140-PB (750-2500C) 

List all items of this typePyrometers and Other Thermal Analysis Equipment

in Testing, Measurement, Analysis and Laboratory

LumaSense impac 140 IR Pyrometer:
1  
222259

MV Products  

340050 400935 

List all items of this typeVacuum Pumping Systems

in Vacuum Pumps

MASS-VAC 340050, 8" POSI-TRAP Housing, NW-50 Connection:
  • Includes:
    • New MASS-VAC 8" POSI-TRAP Housing with NW50 (KF50) Connection (p/n 340050)
    • Each housing includes a quantity of 4 New PolyPro 5µm Filter Elements (p/n 400935).
    • Modular Design Note: You can easily replace these cylindrical elements with other filter types offered by MASS-VAC which range from metallic gauze to activated charcoal to Sodasorb.
    • MV Products packaging and instructions.
  • All metal parts are 300 series Stainless Steel per POSI-TRAP spec sheet.
4 670.00
254889

MDC  

RGV-18P 

List all items of this typeVacuum Gate Valves

in Vacuum Valves

MDC RGV-18P Gate Valve for Slit Transfer Load-lock:
  • MDC Rectangular Pneumatic Gate Valve for Applications such as Load-Lock Transfer.
  • This is a standard MDC catalog component from the C-Loc® Rectangular High Vacuum Series of valves.
  • 1"x 8.3" nominal port/ dimension and nominal weight of 68lbs.  Search RGV-18P in attached PDF for more details.  
  • A Viton series O-ring is standard for the Bonnet seal on these Valves.  Rating is 150 degrees C per attached PDF.
  • New 2025 inventory pending arrival at Cline Innovations by 2/2025.  Actual photos available soon.  Listing compiled on a best effort basis before arrival of goods at Cline Innovations.
2  
220461

MKS instruments  

Astex FI20161-1 Fl20161-1 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

1  
220462

MKS instruments  

Astex FI20161 Fl20161 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

1  
213085

MKS Instruments, Inc  

247D, 247 

List all items of this typeMass Flow Controllers - Gas

in Mass Flow Controllers

MKS 247D 4-Channel Gas Flow Controller:
  • New with original foam-lined box.
  • Unit to be sold with a 90-day limited warranty. 
1 1,200.00 F*
213290

MKS instruments  

SM445.0 SM-445 SM445 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

1   F*
184616

MKS Instruments  

Astex AX2530PPD or equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

MKS Astex 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1  
237494

MKS instruments  

Astex AX2560PPD or FI20116 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

MKS Astex 6kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators. 
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • One factory sealed unit available as of 8/28/2025.
1  
223137

MKS instruments  

Astex FI20164 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

MKS Astex FI20164 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • Physical aesthetic condition is excellent.
1  
236650

Muegge  

MW1003A-210EC 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Muegge 3kW Water-Cooled Microwave Isolator:
  • Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • All necessary 6mm metric fasteners.
  • Dummy load includes a microwave coupler with an N-type power measurement connection.
  • This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts.
  • Additional photos are available upon request.
1  
260484

Muegge Gerling  

914791 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Muegge Gerling 1kW Magnetron Head 914791:
  • Water-cooled 1kW magnetron head with stainless steel enclosure.
  • Goods look to be in new condition.  They have not been tested due to lack of a compatible power supply at Cline Innovations.
  • WR284 waveguide output.
2  
257456

Muegge  

GA1232A 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Muegge Gerling GA1232A 15kW Compact Microwave Dummy Load:
  • Creatively designed, compact, dummy load offers high power capacity for its size.
  • This is an aluminum WR430 rectangular waveguide component engineered to handle up to 15kW of microwave power.
  • Plated brass water cooling section with 1/4" female threaded water-cooling ports.
  • Equipped with single directional coupler (nominally 60dB) with N-type power measurement connection.
  • Detailed photos available upon request.
2  
261158

Narda  

614A 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Narda WR284 Waveguide to N-type Coax Transition:
  • Used, microwave-tested WR284 to Coax Waveguide adaptor.
  • Round flange has 8 equally-spaced holes.
  • This is an older vintage part which appears to be in very good condition.
  • This component was tested by Cline Innovations in 11/2025.
1  
260188

National Electronics  

MH3.0W-SL 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

National Electronics MH3.0W-SL Magnetron Head:
  • Magnetron head with stainless steel enclosure.
  • This MH3.0W-SL model number is similar to the more standard model number MH3.0W-S1.  The MH3.0W-S1 is rated for 3.0kW.  
  • Like the MH3.0W-S1, this magnetron head is assumed to be compatible with the Alter SM1150D (208V) or SM1150T (400V) power supply.
  • Cline Innovations can seek more details on the specifications prior to purchase.
1  
260191

National Electronics  

NL10230-7 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

National Electronics NL10230-7 Water-Cooled Magnetron Tube:
  • Water-cooled magnetron head, likely intended for OEM (Matrix Axcelis) integrated microwave systems.  
  • Photos can be provided upon request.
1  
203376

National Electronics  

WR340TUNERA 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

National Electronics WR340TunerA:
  • One used unit available in inventory.  Unit is functional, but one or more precision dials need to be replaced before shipment.
  • Actual unit may vary from one shown in photos.  We had 2 of these unit in stock, but only one is left in inventory.
  • From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator.  The sum of the two impedances is then seen by the power source as a matched load."
  • At 2450MHz:
    • VSWR:  from 1 to 5
    • Power:  3kW
    • Waveguide type:  WR340
1  
196788

National Electronics  

YJ 1600, YJ-1600 NL 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of YJ1600 magnetron tubes. 
  • Both NEW and USED tubes may be available.  Tube ages and conditions vary. 
  • Most tubes are the conventional YJ1600 design, but some tubes may be available in special water cooling or high-voltage flying-lead configurations.
  • A Limited Warranty may apply depending on factors including customer's intended application & microwave delivery configuration.
  • In general, Cline Innovations coordinates testing of tubes prior to sale unless negotiated otherwise. 
  • Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage. 
  • Cline Innovations double-boxes tubes when shipped to customers.
1  
211664

Thermo / Neslab  

HX + 300W/C 

List all items of this typeChillers

in Facilities Equipment (Chillers, HVAC, Electrical)

Neslab HX-300 Water-Cooled Water Chiller:
  • Compact water chiller equipped with a parallel-plate water-to-water heat exchanger.
  • Equipped with Model TU-5 recirculating pump.
  • Intended for use with 25 to 50 percent Glycol-in-Water mixtures only.
1   F*
261565

Kurt Lesker  

QF16-075-T 

List all items of this typeVacuum Fittings

in Vacuum Instrumentation, Chambers, Pumps, etc.

NW16 Vacuum Tee -- New lot of 4pcs:
  • Kurt J. Lesker QF16-075-T.
  • Offered as a Lot of 4 new pieces at the stated price.  All tees in sealed Kurt Lesker bags.
  • 3-Way Tee, SS, ISO, QF16 / NW16, 3/4"OD Tube.
3 220.00
213174

Pall Corp.  

AB1NA3EYH13 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Pall Ultipor Filter Cartridge (0.2 microns):
  • 0.2 micron filter cartridge with double o-ring seal at one end.
  • Overall length of filter is about 11-1/4".
  • Main filtration section of filter is about 9-5/8" long by 2-1/2" diameter.
  • Only 1 piece in stock.  Filter is still sealed in double-bag.
1  
261563

Pfeiffer Vacuum  

3TR-NW-50-16B 

List all items of this typeVacuum Fittings

in Vacuum Instrumentation, Chambers, Pumps, etc.

Pfeiffer Nor-Cal ISO-KF NW-50 to NW-16 Reducer Tee:
  • Nor-cal 3TR-NW-50-16B.
  • Brand new in factory packaging.
  • 300 Series Stainless Steel.
  • DN 50 ISO-KF and  DN 16 ISO-KF Flange sizes.
  • Quantity discounts will be considered.
  • See attached Nor-Cal 3-page PDF product description.
12 125.00
165893

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma system:
  • This 6-inch Load-Lock PlasmaQuest high density plasma tool was built for for plasma etching, but also offers potential as a unique PECVD deposition tool.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with a 1000W, but higher input power may be viable.
  • Both "as is" sale as well as full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
1  
261019

Sairem  

300W Coaxial 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Sairem 300W Coaxial Microwave Generator :
  • Used, rack-mounted microwave generator with coaxial output.
  • Goods tested by Cline Innovations.
  • Relatively compact design.
1  
260457

Sairem  

GMP-G4-60K-SM-T480-FST-PA  

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Sairem 6kW G4-Series microwave power supply:
  • Switching power supply intended to condition power for a Sairem remote magnetron head.
  • 100% digital architecture.  7" color TFT display and local control interface.
  • This versatile power supply design includes both front panel (Local) as well as computer (Remote) control options making it a good choice for research as well as industrial applications.
  • Cline Innovations does not currently have inventory of the compatible Sairem magnetron head necessary for testing, but 3rd party testing may be possible.
  • This power supply could be used as a backup unit or a suitable magnetron head could be procured.
  • Detailed photos can be provided upon request.
2  
197844

Sairem  

6kW Isolator 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Sairem 6kW Water-Cooled Microwave Isolator:
  • 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
  • Circulator and Dummy Load sections are still factory-sealed together. 
2  
262235

Sairem  

GMP60KSM56T208FST3IR 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Sairem G3-Series GMP60KSM 6kW Microwave Generator:
  • >93% energy efficient switching power supply intended to condition power for a Sairem remote magnetron head.
  • This was the most compact 6kW microwave power supply at the time of production: 19-inch rack, 3U height.
  • This versatile power supply design includes both front panel (Local) as well as computer (Remote) control options making it a good choice for research as well as industrial applications.
  • Digital front panel includes Blue LCD display and Local control interface.
  • Standard analogue and RS232 Remote control (protocol SAIREM).
  • Detailed photos can be provided upon request.
2  
260985

Sairem  

WR284 to WR340 Adaptor 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Sairem WR340 to WR284 Compact Waveguide Adaptor:
  • Rectangular waveguide adaptor with 100mm waveguide length.
  • 10 through holes on each flange.
  • Photos available upon request.
1  
184839

Sandvik  

RA 285.2-355-20 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Sandvik "Modul Mill" Milling Head RA285.2-355 (16 inserts):
  • Large diameter, 16-cutter, Sandvik Milling Head with rugged Shipping/Storage Case.
  • Like New Condition!  No clear indications of use.
  • Approximate diameter is 14-inches so I assume "355" means 355mm nominal cutting diameter.
  • Procured for R&D use, but never used as intended.
  • I recall that the intended R&D use was simulation of automotive engine deck-face machining operations.  However, other machining operations are also possible.
1  
261218

Crystallume  

P820-200646-1 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Surplus 1/16" CVD Diamond-Coated Ball-Nosed End Mill:
 
  • Crystallume "Standard End Mills" with P820 Standard Coating.
  • SKU: P820-200646-1.
  • 1/16" DIA X 1/4" LOC X 1-1/2" OAL, 4 FL Ball End geometry.
  • 1/8" Shank Diameter Tungsten Carbide Tool Body, 4 flutes. 
  • Crystallume Description "Standard End Mills use Our Original and the Most Versatile Coating Thickness, the Standard Premium."
  • $140.50 manufacturer list price as of 9/8/2025.
  • Volume discounts will be considered for these "new in package" surplus diamond tools.
  • Photos can be provided upon request.
 
 
 
10 105.00
260162

Crystallume  

P820-200492-1 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Surplus 1/16" DIA CVD Diamond-Coated Square End Mill:
  • Crystallume "Standard End Mills" SKU: P820-200492-1.
  • 1/16" DIA X 1/4" LOC X 1-1/3" OAL 4 FL Square End geometry.
  • Coating Type: P820 Standard Crystallume Diamond Coating.
  • 1/8" Shank Diameter Tungsten Carbide Tool Body, 4 flutes. 
  • Crystallume Description "Standard End Mills use Our Original and the Most Versatile Coating Thickness, the Standard Premium."
  • $127.50 manufacturer list price as of 8/8/2025.
  • Volume discounts will be considered for these "new in package" surplus diamond tools.
  • Photos can be provided upon request.
14 95.00
260161

Crystallume  

P820-200002-1 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Surplus 3/32" DIA CVD Diamond-Coated Square End Mill:
  • Crystallume "Standard End Mills" SKU: P820-200002-1.
  • 3/32" DIA X 3/8" LOC X 1-1/2" OAL 4 FL Square End tool geometry.
  • Coating Type: P820 Standard Crystallume Diamond Coating.
  • 1/8" Shank Diameter Tungsten Carbide Tool Body, 4 flutes. 
  • Crystallume Description "Standard End Mills use Our Original and the Most Versatile Coating Thickness, the Standard Premium."
  • $127.50 manufacturer list price as of 8/8/2025.
  • Volume discounts will be considered for these "new in package" surplus diamond tools.
  • Photos can be provided upon request.
10 95.00
260404

Kyocera  

Kyocera SGS 91266 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

surplus SGS 91266 diamond-coated 1/16" 2-flute square end mill:
  • 1/16 endmill 2FL SQ TD SER 03S.
  • 1/16x1/8x3/16x1-1/2 geometry.
  • Coating Type: Di-NAMITE Diamond Coating.
  • 1/8" Shank Diameter Tungsten Carbide Tool Body, 2 flutes. 
  • Volume discounts will be considered for these "new in package" surplus diamond tools.
  • Photos can be provided upon request.
5 85.00
203360

Swagelok  

SS-FM4RF4RF4-36 

List all items of this typeProcess Gas and Related Equipment & Parts - Other

in Gas/Reactant Generation and Delivery

Swagelok SS Braided Hose SS-FM4RF4RF4-36:

Swagelok stainless steel, braided, flexible metal hose for process gases.  36" in length.  Part number SS-FM4RF4RF4-36.  This part is new.

1  
203343

Swagelok  

SS-FM4RF4RF4-96 

List all items of this typeProcess Gas and Related Equipment & Parts - Other

in Gas/Reactant Generation and Delivery

Swagelok SS Braided Hose SS-FM4RF4RF4-96:

Swagelok stainless steel, braided, flexible metal hose for process gases.  96" in length.  Part number SS-FM4RF4RF4-96.  This part is new, and still in sealed packaging.

1  
260483

VAT  

01032-KE41-0002/0007 

List all items of this typeVacuum Gate Valves

in Vacuum Valves

VAT KE41 Series 10 Mini UHV Gate Valve:
  • Mini UHV gate valve, Series 010, DN 40 (ID 1½’’) Ordering No. 01032-KE41.
  • Rugged, compact VAT valve with a stainless steel body and KF40 ports.
  • This valve looks to be in excellent condition but has not been tested by Cline Innovations since we don't have a controller on-hand.  This valve appears to have been used lightly.
1  
202813

HNL Inc.  

AMAT 0190-00362 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1  
202812

HNL Inc.  

AMAT 0190-00363 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
  • Microwave waveguide elbow with black painted orange peel finish.
  • Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
  • Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1  
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*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.