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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
  $  
213176

3M  

FP-3M-FBD-24 

List all items of this typeHeating, Ventilating and Air Conditioning Systems

in Facilities Equipment (Chillers, HVAC, Electrical)

3M Fire Barrier Duct Wrap 15A (20ft Roll):
  • 1.5 inch x 24in or 48in x 20 ft Roll
  • This product does not include original factory packaging. 
  • The foil wrap on the roll is in great condition and is clearly marked with the 3M's 15A product label.
  • Photos provided upon request.
1 250.00
180513

Applied Materials  

3750-01129 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

AMAT 3750-01129:
  • This is a brand new microwave waveguide component.
1  
184652

Applied Materials  

FI20104 (3750-01111) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

1  
199844

Applied Materials  

FI20099 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

AMAT Water-Cooled Dummy Load:
  • This is a brand new water-cooled dummy load with WR284 rectangular waveguide connection.
1  
215272

Applied Materials  

0190-02099 / 001 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
  • Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
  • Only 1 in inventory.  Photos provided upon request.
1 425.00
165746

MKS Instruments, Inc  

FI20166 (3750-01147) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex (AMAT) 3kW SmartMatch Tuner:
  • 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
  • Repair required:  Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests. 
  • Repair should be possible. One option is to coordinate MKS factory repair in conjunction with the sale.
1  
168726

Astex  

AX2107 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX (MKS Instruments) AX2107 Microwave Generator 2.45GHz:
  • ASTeX AX2107 700 Watt switching microwave power supply
  • Offered as a power supply only or as a microwave delivery subsystem equipped with magnetron head, cables, and selected waveguide goods.

 

1  
183180

MKS Instruments  

FI20634 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex (MKS) SmartMatch Tuner with Integrated PPD:
  • This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile.  The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".  
  • This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit. 
  • Detailed photos can be provided upon request.
1  
213304

MKS Instruments, Inc  

Astex 1.0kW AX3060 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
1  
211656

MKS Instruments, Inc  

AX3060-1 for AX2115 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
  • Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
  • Actuated 3-stub tuner equipped with water cooling.
  • Unit will be removed from plasma system and physical condition looks great.
1  
225956

Astex  

2.5kW 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex 2.5kW switching microwave generator set:
  • The complete tested, refurbished 2.5kw microwave generator set includes:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator.
    • All interconnecting cables for the above components.
  • Operational and ready to ship with relatively short lead-time. 
  • Limited warranty can be considered depending on the application.
1  
209065

Astex  

FI20131 Fl20131 3750-01139 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex 90-degree Waveguide Elbow:
  • Used goods.
  • Aluminum waveguide with black orange-peel painted exterior.
  • Threaded holes on both flanges (Helicoil inserts).
2  
203295

MKS Instruments, Inc  

FI20608, Fl20608 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

ASTEX 90-degree Waveguide Elbow:
  • Waveguide elbow with 90-degree bend.
  • Aluminum component with black orange-peel paint commonly used on ASTEX goods.
  • 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
  • 4 images attached show the condition of one of used parts.
  • On-site microwave testing may be possible upon request.
3   F*
213180

Astex  

AX2518 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX AX2518 SmartPower Microwave Power Supply:
  • Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
2  
165749

Astex  

AX3153 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex AX3153 or equivalent Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
1  
165748

Astex  

AX3153-1 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex AX3153-1 Dummy Load:
  • WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
  • One used, microwave-tested unit is in Cline Innovations' physical inventory as of 8/20/2021.
1  
184607

Astex  

AX5000, AX6000, AX6350 or similar 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

Astex AX5000 Microwave Plasma Diamond Growth System:
  • Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
  • System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
  • Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
  • This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
  • 1.5kW to 5kW microwave power input.
  • 3 stage options: Cooled, Heated, or Thermally Floating.
  • Integration with computer controls is strongly recommended.
  • Chamber designs vary by vintage, but can be confirmed at the time of quotation.
1   F*
189843

Astex  

AX6500 "Clamshell" MPCVD 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

Astex AX6500 Bottom-launch Diamond Growth System:
  • This in-stock equipment is offered for domestic sale within the USA only. 
  • Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
  • Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
  • System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
    • Chamber cleaning,
    • Computer control updates,
    • Higher throughput water cooling subsystem,
    • Replacement of selected o-ring components with metal seals, and
    • Enhanced process control/monitoring devices.
  • The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
  • Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
  • Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.
1  
165750

Astex  

CS2 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex CS2 Circulator with Directional Coupler:
  • Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
  • Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
1  
190326

Astex  

CS340 or equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex CS340 3-way Circulator :
  • Painted aluminum, air-cooled microwave circulator commonly used with Astex 5000W microwave generators.
  • Equipped with a reflected power coupler at Port 3 (dummy load location).
1  
168802

Astex  

HS 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1  
168804

Astex  

HS-1000, HS1000 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS-1000 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1  
168803

Astex  

HS-1500, HS1500 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

Astex HS-1500 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1  
137483

Astex  

ECR-MOCVD-PECVD 

List all items of this typeSingle Chamber PECVD Tools

in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)

ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD):

High density plasma system activated by ECR-enhanced, 2.45GHz microwave input offers PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.


Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.

1  
222258

Astex  

S-1500i S1500i 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

ASTeX S-1500i Microwave Generator 2.45GHz:
  • Used 1.5kW microwave generator set including the following ASTeX goods:
    • 19-inch rack-mount, switching power supply
    • 3-way circulator with integrated directional coupler
    • Water-cooled dummy load
    • Reflected power diode and associated cable.
    • High Voltage Cable
    • Control Cable
  • Good have already been tested at full power at Cline Innovations.
  • Power supply and mag head both use the larger/preferred HV cable military connector design common to newer-vintage power supplies.
  • Photos coming soon & available upon request.
1  
165710

Astex  

Model LS or Equivalent/Substitute 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex Water-Cooled Dummy Load for use with 1.5kW systems:
  • Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
  • Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
  • New, surplus goods may be available.
1  
190257

Astex  

CPR340 or equivalent 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex WR284 to WR340 Waveguide Adaptor:
  • Aluminum rectangular waveguide component.
  • Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
  • Commonly used with higher power Astex microwave delivery systems & plasma sources.  
  • Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
  • Approximate length is 5 to 6 inches.
1  
184611

Astex  

LS340 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Astex WR340 Water-Cooled Dummy Load:
  • Heat exchanger designed for use with 2.45GHz 5kW AX2040 & A-5000 microwave delivery subsystems used in applications with well-controlled reflected power levels.
1  
196069

Cober  

6kW microwave tuner 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Cober Manual 3-Stub Tuner:
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1  
168904

Cober  

ST89-1019 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Cober ST89-1019 High Power Dummy Load:
  • 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
  • Waveguide component commonly used with 6kW generators including the Cober S6F.
  • UG53/U round flange on WR-284 rectangular waveguide.
1  
197423

Connecticut Microwav  

366004 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Connecticut Microwave Dual-Directional Coupler:
  • 60 dB ports
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Round-flange connections [likely UG53/U  specification]
  • Photos provided upon request.
1  
190937

Detector Technology  

DeTech 1316F 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

DeTech 1316F F Electron Multiplier for FIB 800 Series:
  • DeTech 1316F F Electron Multiplier for FIB 800 Series, FEI Auto Trim.
  • Two electron multiplier units to be sold as a single Lot of 2. 
  • Both acquired with original box and protective foam.  One unit was in a zip-locked bag.
  • We are unable to test these units, so they are offered "as is". Additional inspection is possible upon request. A right of return can be considered.
2  
117831

Edwards  

GV600F GV600 

List all items of this typeVacuum Pumping Systems

in Vacuum Pumps

Edwards Drystar GV600 Dry Pump with Aerzen Roots Blower GLB.15.11 HV-07 :

--Large capacity BOC Edwards GV600F Drystar dry mechanical pump.
--Aerzen GLB.15.11 HV-07 roots blower.
--Please see attached documentation.


From Edwardsvacuum.com:


The design of the Edwards GV dry pumps is based on the well-proven claw technology for dry pumps. Two pairs of claw shaped rotors on two shafts rotate in opposite directions to trap and compress the pro­cess gas which flows along the axis of the shafts between the claw pairs.


During each complete rotation of the claws, first the inlet port of each claw pair is exposed (to admit gas to the pump), then both the inlet and outlet are isolated (to trap and compress the gas), and then the outlet is exposed (to expel the compressed gas). The claw mechanism offers the following features:


•Dry operation, non contact mechanism
•Self valving - the pump can deliver to atmospheric pressure
•Short gas path - better particulate handling
•Staged compression - efficient power use
•High process temperature - excellent water vapor handling


Reliability
Low vacuum bearings (at the exhaust stage of the pump) are protected from the process stream by a unique gas-purged shaft-seal. Compressed air is fed to the shaft seals which prevents the ingress of process contaminants, including gases, vapors and particulates.

Low cost of ownership
GV pumps can offer real cost of ownership savings. The GV pumps are robust and reliable, delivering a reduction in process downtime which would lead to lost production. In addition, the minimized cost of routine maintenance (such as oil and filter replacement, spares inventory holding and oil disposal) all adds to the savings using GV dry pumps. With service intervals of 18 months for re-greased bearings and 3 years for bearing changes, the GV pumps offer a highly reliable and cost effective alternative to piston pumps.

1  
168808

Ferrotec  

HS-2000-SLXSC 

List all items of this typeVacuum Equipment - Other

in Vacuum Instrumentation, Chambers, Pumps, etc.

Ferrotec Ferrofluidic Seal Feedthrough HS-2000-SLXSC:
  • Ferrotec Ferrofluidic Seal Feedthrough Model HS-2000-SLXSC
  • Part Number 50-103321, Revision N
  • New in Original Box (still wrapped in packing materials).
  • Available for Immediate shipment
2  
184653

Ulvac  

FI20170 (0760-01028) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

FI20170 Water-Cooled Circulator with Integrated Coupler:
  • OEM water-cooled circulator with integrated directional coupler.  Likely used on AMAT and/or Ulvac systems.
  • This circulator type is commonly used with 2.5 kW microwave delivery subsystems.
1  
215261

Gerling  

p/n 910677 c/n 403081 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Gerling GAE WR430 Dual Directional Microwave Coupler:
  • Used, in great condition.
  • Intended for use at 55.0 dB coupling factor (forward and reflected).
  • Waveguide length is nominally 5 inches port-to-port.
  • Images can be provided upon request.
1  
197421

Gerling  

GL401A 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Gerling Laboratories 3-Port Circulator:
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • Ceramic magnets look fine.
  • Round-flange connections.
  • Photos provided upon request.
1  
115857
HFCVD System for CVD Diamond and Related Materials 

List all items of this typeHFCVD, HWCVD and Other CVD Tools

in ALL CATEGORIES

HFCVD System for CVD Diamond and Related Materials:
  • Hot Filament CVD system engineered for CVD Diamond growth on a 4 inch (~100mm) rotary platen.
  • Previously used for commercial R&D of polycrystalline CVD diamond materials.
  • 4-inch system design offers excellent potential for diamond, CNTs & related nanomaterials processing for both R&D and/or production.
    • NOT intended or marketed for single-crystal diamond gemstone growth.
  • Related 12-inch (~300mm) production-scale diamond HFCVD equipment is also available. 

4-inch HFCVD system design employs a 2-zone vertically-oriented filament array with independent controls for each zone. Rotary stage maximizes deposition uniformity. External substrate manipulation enables substrate-to-filament distance control. Refractory metal filaments can operate at >2000C and enable thermal decomposition of H2 and hydrocarbons into activated species.

Cline Innovations intends to coordinate reintegration/refurbishment of this system with updated controls and interlocks.  Reintegration will likely include PLC process monitoring, LCD display, pneumatic controls, and other features.  Tailoring of design to meet customer needs may be possible. 

1   F*
214772
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340) 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
  • Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power. 
  • Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
  • If you need to connect to other waveguide types like WR284, adaptors may be available. 
  • An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image.  The assembly example in the image is available for sale as of 5/7/2020.
  • Please contact Cline Innovations to discuss your needs.
1  
190936

Lindgren  

Holaday HI-1501 

List all items of this typeMeters - Other

in Meters

Holaday Microwave Survey Meter HI-1501:
Holaday Microwave Survey Meter, Model number HI-1501, for 2450MHz.  Manufactured by ETS-Lindgren.

This Holaday HI-1501 survey meter comes in a portable, compact case.  The instrument is acceptable to the US Gov't Center for Devices and Radiological Health for compliance testing of microwaves and to all major microwave manufacturers for testing microwaves in use and after repair. 

Comes with manual and carrying case, and has been tested. The detection probe and meter amplifier are calibrated as a unit and serves all three 2450MHz ranges:  2, 10, and 100 mW/cm2.
1  
182423

Hyfra-Pedia (Lennox  

5820W Air-Cooled 

List all items of this typeChillers

in Facilities Equipment (Chillers, HVAC, Electrical)

Hyfra 5820W Air-Cooled Water Chiller:
  • Hyfra is a subsidiary of Lennox International Inc. which is based in Richardson, TX.
  • This rugged chiller was specified for use with a Coborn PL4 diamond polishing bench. Other uses should be possible.
  • On-site testing at Cline Innovations should be possible, if warranted.
1   F*
138488
Large Volume UHV Vacuum Chamber with Sturdy Frame 

List all items of this typeChamber Components - Other

in Vacuum Instrumentation, Chambers, Pumps, etc.

Large Volume UHV Vacuum Chamber with Sturdy Frame:
  • Stainless steel, metal-sealed chamber engineered for high vacuum applications.
  • Previously used for ECR (electron cyclotron resonance) microwave plasma research.

SCALE REFERENCE: Open flange on left side of chamber in Image 2 is an 8" ConFlat.

Please see images & other details in PDF posted under "Extended Description". 

1   F*
117829

Spectra Gases  

 

List all items of this typeLasers & Related Equipment - Other

in Lasers and Related Equipment

Linde,Spectra Gases 3-Bottle Gas Cabinet with 206C Shutdown Controller
:

  • Model 206-C Spectra Gases PLC Control with spares available.
  • Multi Gas Controller set up with two HF transmitters, but other gas options exist from Linde.
  • Removable gas panels equipped with both F2 Premix and inert regulators.
  • Past use for excimer laser in semiconductor industry.
  • Limited controller and sensor/actuator testing has been performed.
6  
222259

MV Products  

340050 400935 

List all items of this typeVacuum Pumping Systems

in Vacuum Pumps

MASS-VAC 340050, 8" POSI-TRAP Housing, NW-50 Connection:
  • Includes:
    • New MASS-VAC 8" POSI-TRAP Housing with NW50 Connection (p/n 340050)
    • New PolyPro 5µm Filter Element (p/n 400935)
    • MV Products packaging and instructions.
  • All metal parts are 300 series Stainless Steel per spec sheet.
2  
214758

Applied Materials  

FI20064  

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Microwave Phase Mag Detector :
  • One unit in inventory. 
  • Please inquire for details, photos, etc.
1  
213085

MKS Instruments, Inc  

247D 

List all items of this typeMass Flow Controllers - Gas

in Mass Flow Controllers

MKS 4-Channel Power Supply and Readout:
  • New with original foam-lined box.
  • Unit to be sold with a 90-day limited warranty. 
  • Tested only to confirm that the unit powered up as expected and display is functional. 
1 1,125.00 F*
213290

MKS Instruments, Inc  

SM445.0 SM-445 SM445 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

MKS Alter SM 445 Switch Mode Microwave Power Supply:
  • Air-cooled microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
  • This specific power supply model is intended for Remote/PC control only.  This unit does NOT have manual front panel controls.
  • Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis.  Interior looks like new.

 

1   F*
223137

MKS Instruments, Inc  

FI20164 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

MKS Astex FI20164 3kW Precision Power Detector:
  • The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
  • The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
  • Physical aesthetic condition is excellent.
1  
220461

MKS Instruments, Inc  

FI20161-1 Fl20161-1 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

1  
220462

MKS Instruments, Inc  

FI20161 Fl20161 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

1  
203376

National Electronics  

WR340TUNERA 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

National Electronics WR340TunerA:
  • One used unit available in inventory.  Unit is functional, but one or more precision dials need to be replaced before shipment.
  • Actual unit may vary from one shown in photos.  We had 2 of these unit in stock, but only one is left in inventory.
  • From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator.  The sum of the two impedances is then seen by the power source as a matched load."
  • At 2450MHz:
    • VSWR:  from 1 to 5
    • Power:  3kW
    • Waveguide type:  WR340
1  
196788

National Electronics  

YJ 1600, YJ-1600 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

National Electronics YJ1600 6kW magnetron tube:
  • Cline Innovations has inventory of several YJ1600 magnetron tubes.  Tube ages and conditions vary.
  • Warranty can be considered depending on application/use details.
  • In general, tubes will be tested at Cline Innovations prior to sale unless negotiated otherwise.
1  
211664

Thermo / Neslab  

HX + 300W/C 

List all items of this typeChillers

in Facilities Equipment (Chillers, HVAC, Electrical)

Neslab HX-300 Water-Cooled Water Chiller:
  • Compact water chiller equipped with a parallel-plate water-to-water heat exchanger.
  • Equipped with Model TU-5 recirculating pump.
  • Intended for use with 25 to 50 percent Glycol-in-Water mixtures only.
  • Unit has not been tested, but it should be possible to test at Cline Innovations if warranted.
1   F*
203278

MKS Instruments, Inc  

3750-01145 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

OEM Water-Cooled Dummy Load:
  • One used, microwave-tested unit in Cline Innovations' Massachusetts inventory as of 8/20/2021.
  
  
  
  
  
  
  
  

 

1  
213174

Pall Corp.  

AB1NA3EYH13 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Pall Ultipor Filter Cartridge (0.2 microns):
  • 0.2 micron filter cartridge with double o-ring seal at one end.
  • Overall length of filter is about 11-1/4".
  • Main filtration section of filter is about 9-5/8" long by 2-1/2" diameter.
  • Only 1 piece in stock.  Filter is still sealed in double-bag.
1  
165893

PlasmaQuest  

6" Load-Lock 

List all items of this typeSilicon Etchers

in Single Chamber Plasma Tools

PlasmaQuest Microwave-ECR Plasma etch system:
  • PlasmaQuest high density plasma etch tool equipped with 6-inch load lock.
  • Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
  • ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
  • Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
  • Originally equipped with 1000W Astex microwave delivery system (AX2110 or equivalent), but higher input power may be viable.
  • System can be offered "as is" to experienced buyers.
  • Full refurbishment for etch and/or PECVD processing can be considered.
  • Configured with 2 modules including power & controls rack and vacuum module.
  • Computer controller may function, but upgrade is recommended and should be possible.
1  
197844

Sairem  

6kW  

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Sairem 6kW water-cooled circulator & dummy load:
  • 3-way microwave circulator and dummy load combination intended for 2.45GHz use.
  • WR340 rectangular waveguide connections.
  • Dummy load includes a microwave coupler with an N-type power measurement connection (66.5dB nominal rating).
  • Unit can be microwave tested prior to shipment, if necessary.
1  
184839

Sandvik  

RA 285.2-355-20 

List all items of this typeOther Items and Mixed Lots of Equipment

in ALL CATEGORIES

Sandvik Milling Head RA285.2-355 (16 inserts):
  • Large diameter, 16-cutter, Sandvik Milling Head with Shipping/Storage Case.
  • Like New Condition!  No clear indications of use.
  • Approximate diameter is 14-inches so I assume "355" means 355mm nominal cutting diameter.
  • Procured for R&D use, but never used as intended.
  • I recall that the intended R&D use was simulation of automotive engine deck-face machining operations.  However, other machining operations are also possible.
1  
203360

Swagelok  

SS-FM4RF4RF4-36 

List all items of this typeProcess Gas and Related Equipment & Parts - Other

in Gas/Reactant Generation and Delivery

Swagelok SS Braided Hose SS-FM4RF4RF4-36:

Swagelok stainless steel, braided, flexible metal hose for process gases.  36" in length.  Part number SS-FM4RF4RF4-36.  This part is new.

1  
203343

Swagelok  

SS-FM4RF4RF4-96 

List all items of this typeProcess Gas and Related Equipment & Parts - Other

in Gas/Reactant Generation and Delivery

Swagelok SS Braided Hose SS-FM4RF4RF4-96:

Swagelok stainless steel, braided, flexible metal hose for process gases.  96" in length.  Part number SS-FM4RF4RF4-96.  This part is new, and still in sealed packaging.

1  
214757

Applied Materials  

FI20132 0040-36436 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Waveguide Elbow with mounting bolts / springs:
  • WR284 90-degree, Waveguide Elbow with Mounts.
  • Only one unit on-hand.  Please inquire for details, photos, etc
1  
202813

Applied Materials  

0190-00362 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
  • Microwave waveguide elbow with black painted orange peel finish.
  • WR284 rectangular waveguide with rectangular flanges.
1  
202812

Applied Materials  

0190-00363 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
  • Microwave waveguide elbow with black painted orange peel finish.
  • Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
1  
197422

Waveline  

225-01 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

Waveline Water-cooled 3-way Circulator :
  • Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
  • 3kW CW rating.
  • Ceramic magnets look fine.
  • UG-584/U round-flange connections.
  • Photos provided upon request.
1  
141147
Williamson Pyrometer, Dual Wavelength (2-color), Pro 80 Series 

List all items of this typePyrometers and Other Thermal Analysis Equipment

in Testing, Measurement, Analysis and Laboratory

Williamson Pyrometer, Dual Wavelength (2-color), Pro 80 Series:
  • Cline Innovations has an inventory of sturdy pre-owned pyrometers from Williamson.
  • Suitable for hydrogen-based plasma applications (such as diamond MPCVD) or more traditional furnace or oven applications.

    This listing includes details of one the Williamson pyrometers that we have in inventory:

--Pyrometer Model: Williamson PRO 82-40
--Temperature Range: 475-1475C
--Field of View: 0.15in@15in (3.81mm@381mm)
--Pyrometer Device Power: 24VDC
--Pyrometer Housing: Rugged, sealed metal casting.
--Model 23 Interface Module (Controller) with advanced functions.

The sensor measurement range (nominally 2 micron IR) is suitable for pyrometry of surfaces exposed to light-emitting hydrogen plasmas (e.g. Diamond MPCVD processes, etc.).  Use for traditional high temperature applications including vacuum brazing, heat treatment, and furnacing is also viable.

1  
215283
WR430 to WR340 Rectangular Waveguide Adaptor 

List all items of this typePlasma Equipment Subsystems, Waveguides, etc.

in Microwave Generators and Process Power Delivery

WR430 to WR340 Rectangular Waveguide Adaptor:
  • Aluminum microwave waveguide transition painted with black "orangepeel" finish.
  • Photos can be provided upon request.
1  
170454

National Electronics  

YJ1191-A, YJ-1191A, YJ 1191A 

List all items of this typeMicrowave and RF Generators

in PVD Power Supplies

YJ1191A 6kW magnetron tube:
  • Choose from a new YJ1191-A unit with full microwave power output or a used, lower output unit depending on your budget and application needs.
  • Test results can be provided upon request prior to purchase.
1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.