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Item ID Short Description Product Type / Details # Price Notes Make Model $ 254916
VAT
F64-114543 / 1
Vacuum Gate Valves
in Vacuum Valves
10-inch CF (DN 250) VAT Series 64 Stainless Gate Valve:
- New with factory foam-lined box.
- 10-inch (DN 250) valve from "Direct Drive" F64-Series.
- Stepper motor driven.
- CF-F Fixed Flange Conflat connections.
- See VAT 64 Series general documentation attached as PDF file.
- Goods due to arrive at Cline Innovations by 2/2025.
- Prelimiinary indications are that this is an all-ConFlat design.
- Photos will be posted as soon as time allows.
1 3M
FP-3M-FBD-24
in Facilities Equipment (Chillers, HVAC, Electrical)
3M Fire Barrier Duct Wrap 15A (20ft Roll) Firewrap:
- 1.5 inch x 24in or 48in x 20 ft Roll
- This product does not include original factory packaging.
- The foil wrap on the roll is in good condition and is clearly marked with the 3M's 15A product label.
- The goods have some minor shelf wear. Photos can be provided upon request to clarify condition at the time of sale.
1 315.00 Applied Materials
3750-01129
in Microwave Generators and Process Power Delivery
AMAT 3750-01129:
- This is a brand new microwave waveguide component.
1 Applied Materials
FI20104 (3750-01111)
in Microwave Generators and Process Power Delivery
1 Applied Materials
FI20099
in Microwave Generators and Process Power Delivery
AMAT Water-Cooled Dummy Load:
- This is a brand new water-cooled dummy load with WR284 rectangular waveguide connection.
1 HNL Inc.
AMAT 0190-02099 / 001
in Microwave Generators and Process Power Delivery
AMAT WAVEGUIDE, CH A, ADAPTER, QDISC-WR284:
- Specialty WR284 waveguide adaptor with threaded, rectangular and quick-disconnect, circular flanges.
- Only 1 in inventory. Photos provided upon request.
- Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1 475.00 MKS instruments
FI20166 (3750-01147)
in Microwave Generators and Process Power Delivery
Astex (AMAT) 3kW SmartMatch Tuner:
- 3-stub automated WR284 3-stub waveguide tuner is engineered for SmartPower microwave generators.
- Repair required: Although this tuner is in great physical condition, the unit failed to progress to a "Ready" status on the LED indicator during January 2019 tests.
- Coordination of this repair may be possible in conjunction with the sale.
1 MKS Instruments
FI20634
in Microwave Generators and Process Power Delivery
Astex (MKS) SmartMatch Tuner with Integrated PPD:
- This is a non-standard waveguide orientation with two 90-degree bends creating a non-symmetric "U-shaped" profile. The SmartMatch unit includes an integrated Precision Power Detector at the bottom of the "U".
- This item seemed to function normally and progressed to a "Ready" status during initial tests of SmartMatch unit.
- Detailed photos can be provided upon request.
1 MKS instruments
Astex 1.0kW AX3060
in Microwave Generators and Process Power Delivery
Astex 1.0kW AX3060 SmartMatch Automated Microwave Tuner:
- Automated microwave impedance matching unit previously used with an Astex 1.0kW microwave generator.
- Actuated 3-stub tuner equipped with water cooling.
1 MKS instruments
AX3060-1 for AX2115
in Microwave Generators and Process Power Delivery
Astex 1.5kW AX3060-1 SmartMatch Automated Microwave Tuner:
- Automated microwave impedance matching unit previously used with an Astex AX2115 1.5kW microwave generator.
- Actuated 3-stub tuner equipped with water cooling.
- Unit will be removed from plasma system and physical condition looks great.
1 Astex
Astex WR340 Circulator
in Microwave Generators and Process Power Delivery
Astex 3-way Circulator or Equivalent:
- Offered as used, microwave-tested goods.
- Painted aluminum, air-cooled microwave circulator with WR340 waveguide connection.
- Equipped with a reflected power coupler & associated SMA connector at Port 3.
- This component design was commonly used on 1990s-vintage Astex high power microwave generators. It also offers potential utility for non-Astex microwave delivery systems.
- Please don't hesitate to contact Cline Innovations for detailed specifications, power limits, and with any questions about compatibility in your specific application.
- Photos available upon request.
1 MKS instruments
FI20608, Fl20608
in Microwave Generators and Process Power Delivery
ASTEX 90-degree Waveguide Elbow:
- Waveguide elbow with 90-degree bend.
- Aluminum component with black orange-peel paint commonly used on ASTEX goods.
- 1 of 2 flanges has threaded holes which accept 1/4-20 bolts.
- 4 images attached show the condition of one of used parts.
- On-site microwave testing may be possible upon request.
3 F*
Astex
FI20131 Fl20131 3750-01139
in Microwave Generators and Process Power Delivery
Astex 90-degree Waveguide Elbow:
- Used goods.
- Aluminum waveguide with black orange-peel painted exterior.
- Threaded holes on both flanges (Helicoil inserts).
2 Astex
Astex A 5000
in PVD Power Supplies
Astex A 5000 5kW Industrial Microwave Generator Set:
- Cline Innovations is offering a complete Model A5000 5000W microwave generator set including cables as well as WR284 waveguide components including:
- Remote water-cooled magnetron head,
- Circulator with integrated directional coupler, and
- Water-cooled dummy load.
- The A5000 design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. It is a tried & true generator used in R&D settings where relatively high microwave power levels are required, especially for long duration operation.
- Testing of the goods can be expedited upon request.
- Photos are also available upon request.
1 Astex
Astex AX2050
in PVD Power Supplies
Astex AX2050 Microwave Generator Set:
- Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
- 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
- Water-cooled 2.5kW magnetron head with variable output.
- Water-cooled 3-way circulator with integrated directional coupler.
- All interconnecting cables for the above components.
- Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
- This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time.
- This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.
- A limited warranty can be considered depending on the application.
- Photos available upon request.
1 Astex
Astex AX2107
in PVD Power Supplies
Astex AX2107 700W Microwave Generator:
- Cline Innovations has a used AX2107 rack-mounted switching power supply which was previously used on a microwave plasma system in a clean-room setting.
- Goods available as a power supply only or as a complete 700W microwave generator set including cables as well as WR284 waveguide components including: remote magnetron head, circulator with integrated directional coupler, and dummy load.
- This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options.
- This specific generator set came from a working system used in an R&D setting. Testing of the goods can be expedited upon request.
- Photos are also available upon request.
1 Astex
Astex AX2518
in PVD Power Supplies
ASTeX AX2518 SmartPower 1.8kW Microwave Power Supply:
- Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
- Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
- Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
- Goods can be sold with a limited warranty.
2 Astex
AX3032
in Microwave Generators and Process Power Delivery
Astex AX3032 (or equivalent) Water-Cooled Circulator & Coupler:
- Water-cooled, 3-way circulator with integrated directional coupler, signal processing board.
- DSubminiature 9-pin connection (for reflected power signal).
- WR284 waveguide component intended for use with Astex 2.5kW microwave generators including AX2050.
1 MKS instruments
AX3120
in Microwave Generators and Process Power Delivery
Astex AX3120 Air-Cooled Microwave Circulator:
- Cline Innovations has an air-cooled Astex circulator intended for use on AX2100 series microwave generators including the AX2115 generator with 1.5kW max 2.45GHz output.
- Goods to be pulled from a waveguide assembly removed from a plasma processing tool. Careful inspection of the ceramic magnet will be performed at the time of disassembly.
- This disassembly can be expedited & photos can be provided upon request.
1 Astex
AX3153
in Microwave Generators and Process Power Delivery
Astex AX3153 or equivalent Dummy Load:
- WR284 Water-cooled Dummy Load intended for use with AX2530, AX2518 microwave generators.
1 Astex
AX5000, AX6000, AX6350 or similar
in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
Astex AX5000 Microwave Plasma Diamond Growth System:
- Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
- System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
- Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
- This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
- 1.5kW to 5kW microwave power input.
- 3 stage options: Cooled, Heated, or Thermally Floating.
- Integration with computer controls is strongly recommended.
- Chamber designs vary by vintage, but can be confirmed at the time of quotation.
- Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.
1 Astex
AX6500 "Clamshell" MPCVD
in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
Astex AX6500 Bottom-launch Diamond Growth System:
- This in-stock equipment is offered for domestic sale within the USA only.
- Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
- Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
- System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
- Chamber cleaning,
- Computer control updates,
- Higher throughput water cooling subsystem,
- Replacement of selected o-ring components with metal seals, and
- Enhanced process control/monitoring devices.
- The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
- Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
- Photo Note: System photo shown include a similar quality, similar vintage system sold in the past. Actual photos or inspection available to qualified customers only.
1 Astex
CS2
in Microwave Generators and Process Power Delivery
Astex CS2 Circulator with Directional Coupler:
- Astex 3-way circulator equipped with integrated coupler (SMC connection) for reflected power measurement.
- Intended for use on Astex generators with up to 1.5kW output such as S1500i and S1000i.
1 Astex
FI20170 (0760-01028) AMAT Ulvac
in Microwave Generators and Process Power Delivery
Astex FI20170 Water-Cooled Circulator (or Equivalent):
- This offer is for a used water-cooled circulator with integrated directional coupler for use on AMAT and/or Ulvac OEM semiconductor equipment.
- The integrated coupler measures reflected power using a diode senor. The reflected power signal is processed using an integral circuit-board designed into the coupler. Output is provided using a 9-pin male D-subminature connector.
- These goods may also be compatible with Astex subsystems for non-OEM applications.
- Goods are most typically integrated with 2.5kW microwave delivery systems.
- Photos included in this listing are for reference only. The actual circulator shown in this listing has been sold, but depicts the general design.
- Please contact Cline Innovations for more information.
1 Astex
ECR-Microwave Plasma
in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
ASTeX High Power, Low Pressure Microwave Plasma System :Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.
Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.
Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.
This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.
1 Astex
Astex Model HS
in PVD Power Supplies
Astex HS Air-Cooled Magnetron Head:
- For use with compatible Astex switching microwave power supplies.
1 Astex
Astex HS-1000 or HS1000
in PVD Power Supplies
Astex HS-1000 Air-Cooled 1000W Magnetron Head:
- For use with compatible Astex 1kW switching microwave power supplies.
1 MKS instruments
Astex ASO2555-55
in PVD Power Supplies
Astex MKS Microwave 55-foot HV Cable for AX2115:
- Long Hight Voltage Cable for OEM Semiconductor Tools including AMAT.
- This cable interconnects cetain Astex rack-mounted power supplies to remote magnetron heads. It is being offered is in excellent, possibly new, condition.
- This 4-pin heavy-duty cable has Cannon military connectors on each end and is marked/rated for 10,000 DC Max voltage & 105 degrees Celsius Max.
- Photos can be provided upon request.
1 Astex
(AGL) Astex B13171
in Microwave Generators and Process Power Delivery
Astex Model B13171 Microwave Dual Directional Coupler:
- Pre-owned dual directional coupler with integrated flange interlock.
- WR284 10-hole rectangular flange on one end, WR284 8-hole flange on the other end.
- Both couplers are factory rated for 60dB.
- Flange interlock can be removed (or not used), but is likely intended to ensure that waveguide flange is connected to an associated microwave power supply.
- Coupler is likely intended for use with Astex top-launch microwave generator Model OEM-C13170 & likely on Gasonics PEP systems.
- Although the interlock has not been tested, the directional coupler has been used on a Cline Innovations test bench in the past.
- Photos and further information can be provided upon request.
1 Astex
Model TS or Equivalent
in Microwave Generators and Process Power Delivery
ASTEX Three Stub Manual Microwave Impedance Tuner:
- Pre-owned manual 3-stub tuner equipped with WR284 rectangular waveguide and precision dials.
- This tuner design is intended for use with 2.45GHz microwaves.
- Astex sold goods of this general design for use on generators rated for outputs of up to 5kW. Actual rating can be clarified at the time of sale in relation to your application details.
- The goods can be used on Astex (now MKS Instruments) as well as other brands of microwave generators with waveguide output including WR284, WR340, WR430.
- Refurbished as needed to ensure mechanical and electromagnetic functionality.
- These dials can age or get jammed due to impact. Cline Innovations replaces dials and components as needed during refurbishment.
1 Astex
Model LS or Equivalent/Substitute
in Microwave Generators and Process Power Delivery
Astex Water-Cooled Dummy Load for use with 1.5kW systems:
- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok SS adaptors.
- Female pipe-threaded design minimizes wear and tear common to older generation Astex dummy loads.
- New, surplus goods may be available.
1 Astex
AX3030
in Microwave Generators and Process Power Delivery
Astex Water-Cooled Dummy Load p/n AX3030 or equivalent:
- Astex (MKS Instruments) dummy load equipped with WR284 waveguide and 3/8" Swagelok adaptors.
- Design intended for up to 500W continuous reflected power.
- Design commonly paired with an air-cooled Astex to handle output from Astex generators with up to 1.5kW output.
- Photos available upon request.
1 Astex
CPR340 or equivalent
in Microwave Generators and Process Power Delivery
Astex WR284 to WR340 Waveguide Adaptor:
- Aluminum rectangular waveguide component.
- Black-painted "orange-peel" texture common to Astex (MKS) waveguide components.
- Commonly used with higher power Astex microwave delivery systems & plasma sources.
- Functional with Astex and non-Astex microwave goods at 2.45GHz frequency.
- Approximate length is 5 to 6 inches.
1 Astex
Astex WR340 Dummy Load
in Microwave Generators and Process Power Delivery
Astex WR340 Water-Cooled Dummy Load:
- Offered as used, microwave-tested goods.
- WR340 2.45GHz microwave waveguide component designed for use with 1990s-vintage 2.45GHz 5kW microwave delivery subsystems.
- Please don't hesitate to inquire to discuss possible functionality on Astex and non-Astex microwave delivery systems.
- Photos available upon request.
2 Cober
6kW microwave tuner
in Microwave Generators and Process Power Delivery
Cober Manual 3-Stub Tuner:
- Waveguide component commonly used with 6kW generators including the Cober S6F.
- UG53/U round flange on WR-284 rectangular waveguide.
1 Cober
ST89 microwave
in Microwave Generators and Process Power Delivery
Cober ST89-1019 High Power Dummy Load:
- 2.45GHz microwave dummy load with direct cooling via microwave coupling to cooling water channel
- Waveguide component commonly used with 6kW generators including the Cober S6F.
- UG53/U round flange on WR-284 rectangular waveguide.
1 Connecticut Microwav
366004
in Microwave Generators and Process Power Delivery
Connecticut Microwave Dual-Directional Coupler:
- 60 dB ports
- Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
- Round-flange connections [likely UG53/U specification]
- Photos provided upon request.
1 Detector Technology
DeTech 1316F
in ALL CATEGORIES
DeTech 1316F F Electron Multiplier for FIB 800 Series:
- DeTech 1316F F Electron Multiplier for FIB 800 Series, FEI Auto Trim.
- Two electron multiplier units to be sold as a single Lot of 2.
- Both acquired with original box and protective foam. One unit was in a zip-locked bag.
- We are unable to test these units, so they are offered "as is". Additional inspection is possible upon request. A right of return can be considered.
2 Edwards
GV600F GV600
in Vacuum Pumps
Edwards Drystar GV600 Dry Pump with Aerzen Roots Blower GLB.15.11 HV-07 :--Large capacity BOC Edwards GV600F Drystar dry mechanical pump.
--Aerzen GLB.15.11 HV-07 roots blower.
--Please see attached documentation.
From Edwardsvacuum.com:
The design of the Edwards GV dry pumps is based on the well-proven claw technology for dry pumps. Two pairs of claw shaped rotors on two shafts rotate in opposite directions to trap and compress the process gas which flows along the axis of the shafts between the claw pairs.
During each complete rotation of the claws, first the inlet port of each claw pair is exposed (to admit gas to the pump), then both the inlet and outlet are isolated (to trap and compress the gas), and then the outlet is exposed (to expel the compressed gas). The claw mechanism offers the following features:
•Dry operation, non contact mechanism
•Self valving - the pump can deliver to atmospheric pressure
•Short gas path - better particulate handling
•Staged compression - efficient power use
•High process temperature - excellent water vapor handling
Reliability
Low vacuum bearings (at the exhaust stage of the pump) are protected from the process stream by a unique gas-purged shaft-seal. Compressed air is fed to the shaft seals which prevents the ingress of process contaminants, including gases, vapors and particulates.
Low cost of ownership
GV pumps can offer real cost of ownership savings. The GV pumps are robust and reliable, delivering a reduction in process downtime which would lead to lost production. In addition, the minimized cost of routine maintenance (such as oil and filter replacement, spares inventory holding and oil disposal) all adds to the savings using GV dry pumps. With service intervals of 18 months for re-greased bearings and 3 years for bearing changes, the GV pumps offer a highly reliable and cost effective alternative to piston pumps.1 MKS instruments
Astex FI20047
in PVD Power Supplies
FI20047 Water-Cooled Magnetron Head:
- Mag Head for use with compatible MKS Astex series switching microwave power supplies.
- This mag head design includes an orange colored Caton HV connector.
- Goods in inventory may already have test history. Testing may be possible at Cline Innovations.
- Photos can be provided upon request.
1 Gerling
GA2001
in Microwave Generators and Process Power Delivery
GAE GA2001 WR284 Waveguide to N Coax Transition:
- Model GAE GA2001
- Tag reads "Waveguide Trans CPR284 to N"
- This is a WR284 rectangular waveguide microwave power transition to N-type coax.
1 Gerling
p/n 910677 c/n 403081
in Microwave Generators and Process Power Delivery
Gerling GAE WR430 Dual Directional Microwave Coupler:
- Used, in great condition.
- Intended for use at 55.0 dB coupling factor (forward and reflected).
- Waveguide length is nominally 5 inches port-to-port.
- Images can be provided upon request.
1 Gerling
GL401A
in Microwave Generators and Process Power Delivery
Gerling Laboratories 3-Port Circulator:
- Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
- Ceramic magnets look fine.
- Round-flange connections.
- Photos provided upon request.
1
in ALL CATEGORIES
HFCVD System for CVD Diamond and Related Materials:
- Hot Filament CVD system engineered for CVD Diamond growth on a 4 inch (~100mm) rotary platen.
- Previously used for commercial R&D of polycrystalline CVD diamond materials.
- 4-inch system design offers excellent potential for diamond, CNTs & related nanomaterials processing for both R&D and/or production.
- NOT intended or marketed for single-crystal diamond gemstone growth.
- Related 12-inch (~300mm) production-scale diamond HFCVD equipment is also available.
4-inch HFCVD system design employs a 2-zone vertically-oriented filament array with independent controls for each zone. Rotary stage maximizes deposition uniformity. External substrate manipulation enables substrate-to-filament distance control. Refractory metal filaments can operate at >2000C and enable thermal decomposition of H2 and hydrocarbons into activated species.
Cline Innovations intends to coordinate reintegration/refurbishment of this system with updated controls and interlocks. Reintegration will likely include PLC process monitoring, LCD display, pneumatic controls, and other features. Tailoring of design to meet customer needs may be possible.1
in Microwave Generators and Process Power Delivery
High Power Dummy Load, 2.45GHz (e.g. 6kW, WR340):
- Cline Innovations tends to have inventory of high power dummy loads capable of handling nominally 6kW of reflected power.
- Dummy loads of this power rating range tend to be WR340 rectangular waveguide size. WR284 waveguide type is less common, but may be available.
- If you need to connect to other waveguide types like WR284, adaptors may be available.
- An example of a WR340 high power dummy load adapted to WR284 is shown in the attached image. The assembly example in the image is available for sale as of 5/7/2020.
- Please contact Cline Innovations to discuss your needs.
1 Lindgren
Holaday HI-1501
in Meters
Holaday Microwave Survey Meter HI-1501:
Holaday Microwave Survey Meter, Model number HI-1501, for 2450MHz. Manufactured by ETS-Lindgren.
This Holaday HI-1501 survey meter comes in a portable, compact case. The instrument is acceptable to the US Gov't Center for Devices and Radiological Health for compliance testing of microwaves and to all major microwave manufacturers for testing microwaves in use and after repair.
Comes with manual and carrying case, and has been tested. The detection probe and meter amplifier are calibrated as a unit and serves all three 2450MHz ranges: 2, 10, and 100 mW/cm2.1 Hyfra-Pedia (Lennox
5820W Air-Cooled
in Facilities Equipment (Chillers, HVAC, Electrical)
Hyfra 5820W Air-Cooled Water Chiller:
- Hyfra is a subsidiary of Lennox International Inc. which is based in Richardson, TX.
- This rugged chiller was specified for use with a Coborn PL4 diamond polishing bench. Other uses should be possible.
- On-site testing at Cline Innovations should be possible, if warranted.
1
in Vacuum Instrumentation, Chambers, Pumps, etc.
Large Volume UHV Vacuum Chamber with Sturdy Frame:
- Stainless steel, metal-sealed chamber engineered for high vacuum applications.
- Previously used for ECR (electron cyclotron resonance) microwave plasma research.
SCALE REFERENCE: Open flange on left side of chamber in Image 2 is an 8" ConFlat.
Please see images & other details in PDF posted under "Extended Description".1 Spectra Gases
in Lasers and Related Equipment
Linde,Spectra Gases 3-Bottle Gas Cabinet with 206C Shutdown Controller
:
- Model 206-C Spectra Gases PLC Control with spares available.
- Multi Gas Controller set up with two HF transmitters, but other gas options exist from Linde.
- Removable gas panels equipped with both F2 Premix and inert regulators.
- Past use for excimer laser in semiconductor industry.
- Limited controller and sensor/actuator testing has been performed.
6 Advanced Energy
IMPAC p/n IS 140-PB (750-2500C)
in Testing, Measurement, Analysis and Laboratory
LumaSense impac 140 IR Pyrometer:
- LumaSense Technologies GmbH IMPAC IS 140-PB 750-2500C IR Pyrometer.
- Telescoping lense is clearly marked a=340-4000mm.
- Impac and LumaSense appear to be part of Advanced Energy as of 2024: See The Global Leader in Temperature and Gas Sensing Solutions - LumaSense Technologies A/S (lumasenseinc.com)
- Multiple units likely to be in inventory. Please contact Cline Innovation to confirm physical inventory with this specification.
- Photos available upon request.
1 MV Products
340050 400935
in Vacuum Pumps
MASS-VAC 340050, 8" POSI-TRAP Housing, NW-50 Connection:
- Includes:
- New MASS-VAC 8" POSI-TRAP Housing with NW50 (KF50) Connection (p/n 340050)
- New PolyPro 5µm Filter Elements (p/n 400935). (Quantity to be confirmed, but likely 3 or 4 p/n 400935 elements.)
- MV Products packaging and instructions.
- All metal parts are 300 series Stainless Steel per spec sheet.
2 700.00 MDC
RGV-18P
in Vacuum Valves
MDC RGV-18P Gate Valve for Slit Transfer Load-lock:
- MDC Rectangular Pneumatic Gate Valve for Applications such as Load-Lock Transfer.
- This is a standard MDC catalog component from the C-Loc® Rectangular High Vacuum Series of valves.
- 1"x 8.3" nominal port/ dimension and nominal weight of 68lbs. Search RGV-18P in attached PDF for more details.
- A Viton series O-ring is standard for the Bonnet seal on these Valves. Rating is 150 degrees C per attached PDF.
- New 2025 inventory pending arrival at Cline Innovations by 2/2025. Actual photos available soon. Listing compiled on a best effort basis before arrival of goods at Cline Innovations.
2 Applied Materials
FI20064
in Microwave Generators and Process Power Delivery
Microwave Phase Mag Detector :
- One unit in inventory.
- Please inquire for details, photos, etc.
1 MKS instruments
Astex FI20161-1 Fl20161-1
in PVD Power Supplies
1 MKS instruments
Astex FI20161 Fl20161
in PVD Power Supplies
1 MKS instruments
247D, 247
in Mass Flow Controllers
MKS 247D 4-Channel Power Supply and Readout:
- New with original foam-lined box.
- Unit to be sold with a 90-day limited warranty.
- Tested only to confirm that the unit powered up as expected and display is functional.
1 1,200.00 MKS instruments
SM445.0 SM-445 SM445
in PVD Power Supplies
MKS Alter SM 445 Switch Mode Microwave Power Supply:
- Air-cooled, rack-mounted microwave power supply for use with 1.25 kW, 2.45 GHz magnetrons.
- This specific power supply model is intended for Remote/PC control only. This unit does NOT have manual front panel controls.
- Power supply condition looks very good except for some cosmetic blemishes on metal lid and corners of chassis. Interior looks like new.
1 MKS Instruments
AX2530PPD or equivalent
in Microwave Generators and Process Power Delivery
MKS Astex 3kW Precision Power Detector:
- The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
- The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1 MKS instruments
AX2560PPD or equivalent
in Microwave Generators and Process Power Delivery
MKS Astex 6kW Precision Power Detector:
- The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
- The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
1 MKS instruments
FI20164
in Microwave Generators and Process Power Delivery
MKS Astex FI20164 3kW Precision Power Detector:
- The MKS/Astex PPD waveguide section is used to simultaneously measure forward and reflected power measurements when used in conjunction with Astex SmartPower microwave generators.
- The PPD can also be used with AX3060 SmartMatch microwave auto tuning systems (automated 3-stub tuners).
- Physical aesthetic condition is excellent.
1 Muegge
MW1003A-210EC
in Microwave Generators and Process Power Delivery
Muegge 3kW Water-Cooled Microwave Isolator:
- Used 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
- WR340 rectangular waveguide connections.
- All necessary 6mm metric fasteners.
- Dummy load includes a microwave coupler with an N-type power measurement connection.
- This isolator is used, but Dummy Load and Circulator sections are still factory-sealed with gray-paint applied to 6mm hex bolts.
- Additional photos are available upon request.
1 National Electronics
WR340TUNERA
in Microwave Generators and Process Power Delivery
National Electronics WR340TunerA:
- One used unit available in inventory. Unit is functional, but one or more precision dials need to be replaced before shipment.
- Actual unit may vary from one shown in photos. We had 2 of these unit in stock, but only one is left in inventory.
- From National Electronics documentation: "...can be used to develop an impedance in the waveguide that is the reciprocal of the impedance of the applicator. The sum of the two impedances is then seen by the power source as a matched load."
- At 2450MHz:
- VSWR: from 1 to 5
- Power: 3kW
- Waveguide type: WR340
1 National Electronics
YJ 1600, YJ-1600 NL
in PVD Power Supplies
National Electronics YJ1600 6kW magnetron tube:
- Cline Innovations has inventory of YJ1600 magnetron tubes.
- Both NEW and USED tubes may be available. Tube ages and conditions vary.
- Most tubes are the conventional YJ1600 design, but some tubes may be available in special water cooling or high-voltage flying-lead configurations.
- A Limited Warranty may apply depending on factors including customer's intended application & microwave delivery configuration.
- In general, Cline Innovations coordinates testing of tubes prior to sale unless negotiated otherwise.
- Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage.
- Cline Innovations double-boxes tubes when shipped to customers.
1 Thermo / Neslab
HX + 300W/C
in Facilities Equipment (Chillers, HVAC, Electrical)
Neslab HX-300 Water-Cooled Water Chiller:
- Compact water chiller equipped with a parallel-plate water-to-water heat exchanger.
- Equipped with Model TU-5 recirculating pump.
- Intended for use with 25 to 50 percent Glycol-in-Water mixtures only.
1 Pall Corp.
AB1NA3EYH13
in ALL CATEGORIES
Pall Ultipor Filter Cartridge (0.2 microns):
- 0.2 micron filter cartridge with double o-ring seal at one end.
- Overall length of filter is about 11-1/4".
- Main filtration section of filter is about 9-5/8" long by 2-1/2" diameter.
- Only 1 piece in stock. Filter is still sealed in double-bag.
1 PlasmaQuest
6" Load-Lock
in Single Chamber Plasma Tools
PlasmaQuest Microwave-ECR Plasma system:
- This 6-inch Load-Lock PlasmaQuest high density plasma tool was built for for plasma etching, but also offers potential as a unique PECVD deposition tool.
- Unique combo of permanent magnet and electromagnets for ECR (Electron Cyclotron Resonance) ECR-enhancement of microwave plasma.
- ECR operation in mTorr pressure range yields large area plasma processing capability for planar and low profile parts.
- Stage height adjustment range relative to core plasma activation volume enables high levels of ECR process enhancement (species activation).
- Originally equipped with a 1000W, but higher input power may be viable.
- Both "as is" sale as well as full refurbishment for etch and/or PECVD processing can be considered.
- Configured with 2 modules including power & controls rack and vacuum module.
1 Sairem
6kW
in Microwave Generators and Process Power Delivery
Sairem 6kW Water-Cooled Microwave Isolator:
- 3-way microwave circulator & dummy load combination intended for 2.45GHz use.
- WR340 rectangular waveguide connections.
- Dummy load includes a microwave coupler with an N-type power measurement connection with known sensitivity (dB rating).
- Circulator and Dummy Load sections are still factory-sealed together.
2 Sandvik
RA 285.2-355-20
in ALL CATEGORIES
Sandvik Milling Head RA285.2-355 (16 inserts):
- Large diameter, 16-cutter, Sandvik Milling Head with Shipping/Storage Case.
- Like New Condition! No clear indications of use.
- Approximate diameter is 14-inches so I assume "355" means 355mm nominal cutting diameter.
- Procured for R&D use, but never used as intended.
- I recall that the intended R&D use was simulation of automotive engine deck-face machining operations. However, other machining operations are also possible.
1 Swagelok
SS-FM4RF4RF4-36
in Gas/Reactant Generation and Delivery
Swagelok SS Braided Hose SS-FM4RF4RF4-36:Swagelok stainless steel, braided, flexible metal hose for process gases. 36" in length. Part number SS-FM4RF4RF4-36. This part is new.
1 Swagelok
SS-FM4RF4RF4-96
in Gas/Reactant Generation and Delivery
Swagelok SS Braided Hose SS-FM4RF4RF4-96:Swagelok stainless steel, braided, flexible metal hose for process gases. 96" in length. Part number SS-FM4RF4RF4-96. This part is new, and still in sealed packaging.
1 Applied Materials
FI20132 0040-36436
in Microwave Generators and Process Power Delivery
Waveguide Elbow with mounting bolts / springs:
- WR284 90-degree, Waveguide Elbow with Mounts.
- Only one unit on-hand. Please inquire for details, photos, etc
1 HNL Inc.
AMAT 0190-00362
in Microwave Generators and Process Power Delivery
WAVEGUIDE, 90DEG E-PLANE BEND, 3.5 X 2.5 :
- Microwave waveguide elbow with black painted orange peel finish.
- WR284 rectangular waveguide with rectangular flanges.
- Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1 HNL Inc.
AMAT 0190-00363
in Microwave Generators and Process Power Delivery
WAVEGUIDE, 90DEG E-PLANE BEND, 4.0 X 2.0:
- Microwave waveguide elbow with black painted orange peel finish.
- Each WR284 rectangular flange is equipped with 10 threaded holes to accept 1/4"-20 bolts.
- Please search "HNL" for our inventory of other HNL Inc. waveguide parts produced for Applied Materials.
1 Waveline
225-01
in Microwave Generators and Process Power Delivery
Waveline Water-cooled 3-way Circulator :
- Water-cooled design, WR284 waveguide size, intended for 2.45 GHz use.
- 3kW CW rating.
- Ceramic magnets look fine.
- UG-584/U round-flange connections.
- Photos provided upon request.
1 Wavemat
Diamond 915MHz MPCVD
in Plasma CVD Tools (MPCVD, PECVD, ECR-CVD)
Wavemat 915MHz MPCVD Diamond Growth System:Cline Innovations is offering a Wavemat 915MHz microwave CVD diamond growth system. This deposition system is recommended for CVD diamond and/or large area plasma equipment development purposes.
This system is capable of operation over a broad parametric space including 1.) large volume/diameter, low plasma power densities using a thermally-floating stage design or 2.) confined volume/diameter higher plasma power densities using a water-cooled stage design.
Major System Features:
- Wavemat 915MHz internally-tunable microwave plasma apparatus.
- Nominally 10-inch diameter fused quartz bell jar enables handling of large area fixtures and substrates.
- Roughly 4.5" processing diameter with water-cooled stage.
- Roughly 6.0" processing diameter with thermally-floating stage.
- Larger area processing may certainly be possible with system modifications, enhanced cooling.
- Double-jacketed stainless steel loading chamber mounted to a sturdy welded steel frame with thick aluminum tabletop.
- Typically operated at power levels under 12kW.
- Modular design enables application-specific modifications, plasma source development, etc.
- PC-based LabView controls.
1
in Testing, Measurement, Analysis and Laboratory
Williamson Pyrometer, Dual Wavelength (2-color), Pro 80 Series:
- Cline Innovations has an inventory of sturdy pre-owned pyrometers from Williamson.
- Suitable for hydrogen-based plasma applications (such as diamond MPCVD) or more traditional furnace or oven applications.
This listing includes details of one the Williamson pyrometers that we have in inventory:--Pyrometer Model: Williamson PRO 82-40
--Temperature Range: 475-1475C
--Field of View: 0.15in@15in (3.81mm@381mm)
--Pyrometer Device Power: 24VDC
--Pyrometer Housing: Rugged, sealed metal casting.
--Model 23 Interface Module (Controller) with advanced functions.
The sensor measurement range (nominally 2 micron IR) is suitable for pyrometry of surfaces exposed to light-emitting hydrogen plasmas (e.g. Diamond MPCVD processes, etc.). Use for traditional high temperature applications including vacuum brazing, heat treatment, and furnacing is also viable.1
in Microwave Generators and Process Power Delivery
WR430 to WR340 Rectangular Waveguide Adaptor:
- Aluminum microwave waveguide transition painted with black "orangepeel" finish.
- Photos can be provided upon request.
1 National Electronics
YJ1191-A, YJ-1191A, YJ 1191A NL
in PVD Power Supplies
YJ1191A 6kW magnetron tube:
- Cline Innovations has muliple YJ1191A magnetron tubes in physical inventory.
- Both NEW-tested and USED-tested YJ1191A tubes are available as of 1/15/2025.
- All YJ1191A tubes are tested prior to sale. Customer's can choose from units full microwave power output or lower power output unit depending on budget and application needs.
- Since tubes contain fragile components, Cline Innovations handles all tubes with care, regardless of vintage. Cline Innovations double-boxes tubes when shipped to customers.
1
* Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment ManufacturerNOTE:
reference document attached
F* if the item is specially featured
N* if the item is newly added, and/or
R* if the item's price is recently reduced.
Group Offers into sub-categories 